Installation for making available highly pure fine chemicals
AssigneeKinetics Germany GmbH
InventorsTodd Graves, Martin Vondran, Martin Benzinger
Life of this patent
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Abstract
A system and method for providing process chemicals. The system includes a housing comprising a functional component positioned in a first compartment, a control module positioned in a second compartment and at least one connecting line positioned in a third compartment. At least one compartment is positioned in a defined location in the housing. Modules may be removable received in their respective compartments.
Claims28
A system for providing process chemicals, comprising:
- a first housing comprising a first compartment, a second compartment, and a third compartment;
- a functional module positioned in the first compartment;
- a control module positioned in the second compartment;
- and
- at least one connecting line positioned in the third compartment, wherein at least one of the first, second, and third compartments is positioned in a defined location in the housing.
The system of claim 5, wherein the fourth compartment comprises a rack.
The system of 1, wherein at least one of the functional module and the control module are removable.
A system for providing process chemicals, comprising:
- a housing comprising a first compartment,
- wherein the first compartment is constructed and arranged to removably receive any of:
- a maintenance module;
- a sample;
- drawing module;
- an analytical module;
- a humidifier module;
- a tank module;
- a DI module;
- a mixing module;
- a mixing tank module;
- a sensor module;
- a single pump a maintenance module;
- a sample;
- drawing module;
- an analytical module;
- a humidifier module;
- a tank module;
- a DI module;
- a mixing module;
- a mixing tank module;
- a sensor module;
- a single pump module;
- a double pump module;
- a single filter module;
- and a double filter module.
A method of providing process chemicals, comprising;
- providing a housing comprising a first compartment, wherein the first compartment is constructed and arranged to removably receive a functional module;
- and
- providing a functional module selected from the group consisting of:
- a maintenance module;
- a sample;
- drawing module;
- an analytical module;
- a humidifier module;
- a tank module;
- a DI module;
- a mixing module;
- a mixing tank module;
- a sensor module;
- a single pump module;
- a double pump module;
- a single filter module;
- and a double filter module.
Dependencies are inferred from the claim text.