# US 2004/0069233 A1 · Apparatus for evaporation of materials for coating of objects

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- Number: US 2004/0069233 A1
- Document ID: US20040069233A1
- Status: Published application
- Kind: A1
- Application number: 10/450,687
- Filed: 2003-11-17
- Published: 2004-04-15
- Earliest claimed: 2000-12-18
- Inventors: Pavel Holubar; Mojmir Jilek
- Web page: https://patentgrep.com/patent/US20040069233A1

## CPC

- H01J 37/32055: {Arc discharge}
- H01J 37/3266: {Magnetic control means}
- H01J 37/3405: {Magnetron sputtering}
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

Apparatus for evaporation of materials for coating of objects by a physical method (PVD) using low voltage electric arc, such apparatus being equipped with a source (4a, 4b, 4) of magnetic field and an anode (3) and a cathode (2a, 2b, 2) of electric arc. At least one cathode (2a, 2b, 2) and at least one source (4a, 4b, 4) of magnetic field can pivot in the coating chamber (1).

## Claims

### Claim 1

Apparatus for evaporation of materials for coating of objects by a physical method using low voltage electric arc, such apparatus being equipped with a source of magnetic field and with an anode and a cathode of electric arc, characterized in that at least one cathode (2a, 2b, 2) and at least one source (4a, 4b, 4) of magnetic field can pivot with respect to one another in a coating chamber (1).

### Claim 2 (depends on 1)

Apparatus according to claim 1, characterized in that the source (4a, 4b, 4) of magnetic field consists of at least one magnetic coil (7a, 7b, 7).

### Claim 3 (depends on 1)

Apparatus according to claim 1, characterized in that the source (4a, 4b, 4) of magnetic field consists of at least one permanent magnet.

### Claim 4 (depends on 1, 2, 3)

Apparatus according to claim 1 or 2 or 3, characterized in that the cathode (2a, 2b, 2) is cylindrical.

### Claim 5 (depends on 1, 2, 3)

Apparatus according to claim 1 or 2 or 3, characterized in that the source (4a, 4b, 4) of magnetic field is accommodated inside the cathode (2a, 2b, 2).

### Claim 6 (depends on 1, 2, 3, 4, 5)

Apparatus according to any of claims 1 to 5, characterized in that the cathode (2a, 2b, 2) is arranged so as to pivot.

### Claim 7 (depends on 6)

Apparatus according to claim 6, characterized in that the source (4a, 4b, 4) of magnetic field is arranged as immovable.

### Claim 8 (depends on 1, 2, 3, 4, 5)

Apparatus according to any of claims 1 to 5, characterized in that the source (4a, 4b, 4) of magnetic field is arranged so as to pivot.

### Claim 9 (depends on 8)

Apparatus according to claim 8, characterized in that the cathode (2a, 2b, 2) is arranged as immovable.

### Claim 10 (depends on 1, 2, 3, 4, 5, 6, 7, 8, 9)

Apparatus according to any of claims 1 to 9, characterized in that the cathode (2a, 2b, 2) is arranged in the central region of the coating chamber (1).

### Claim 11 (depends on 10)

Apparatus according to claim 10, characterized in that the anode (3) is attached to the source (4a, 4b, 4) of the magnetic field.

### Claim 12 (depends on 11)

Apparatus according to claim 11, characterized in that at least two cathodes (2a, 2b, 2) are arranged symmetrically to anode (3).

### Claim 13 (depends on 1, 2, 3, 4, 5, 6, 7, 8, 9)

Apparatus according to any of claims 1 to 9, characterized in that the cathode is accommodated between the wall of coating chamber (1) and the objects to be coated.

### Claim 14 (depends on 1, 13)

Apparatus according to claim 1 or 13, characterized in that the source (4a, 4b, 4) of magnetic field is directed to the centre of the coating chamber (1).

### Claim 15 (depends on 13)

Apparatus according to claim 13, characterized in that the anode (3) is divided at least in two sections arranged at the sides of the cathode (2a, 2b, 2).

### Claim 16 (depends on 15)

Apparatus according to claim 15, characterized in that between the single sections of anode (3) at least two cathodes (2, 2a, 2b) are accommodated.