Method for evaluating particle concentrations in a clean room or machine mini-environment
AssigneeS.O.I. Tec Silicon on Insulator Technologies
InventorChristophe Maleville
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Abstract
A method for evaluating particle concentrations in the atmosphere of a clean room or of a machine mini-environment is described. The method includes exposing a test surface of a test substrate to the atmosphere for a test time, capturing an amount of particles at the test surface of the substrate at the end of the test time, analyzing the amount of captured particles, and comparing the analyzed amount of particles with a reference amount of particles from a reference substrate. An evaluation of the atmosphere of the room or environment can thus be accomplished in a relatively short time.
Claims21
A method for evaluating particle concentrations in the atmosphere of a clean room or similar environment comprising:
- exposing a test surface of a test substrate to the atmosphere for a test time to capture an amount of particles;
- analyzing the amount of captured particles;
- and
- comparing the analyzed amount of particles with a reference amount of particles from a reference substrate to determine the particle concentration in the environment.
Dependencies are inferred from the claim text.