Surface inspection method, surface inspection apparatus, and recording medium and data signal for providing surface inspection program

A surface inspection method for inspecting a pattern formed at a surface of a test piece, comprising:

• a first step in which a plurality of diffraction conditions that are different from each other are set;
• a second step in which diffracted light from the surface of the test piece is detected by irradiating illumination light onto the surface of the test piece under each of said plurality of diffraction conditions;
• a third step in which a plurality of sets of detection information corresponding to said plurality of diffraction conditions are generated based upon the detected light;
• a fourth step in which a condition which is other than said diffraction conditions and is outside design diffraction conditions determined in conformance to said pattern is set;
• a fifth step in which scattered light from the surface of the test piece is detected by irradiating said illumination light onto the surface of the test piece under the condition other than said diffraction conditions;
• a sixth step in which detection information corresponding to the condition other than said diffraction conditions is generated based upon the scattered light that has been detected;
• a seventh step in which a logical OR of said plurality of sets of detection information generated in said third step and said detection information generated in said sixth step is obtained;
• and
• an eighth step in which a decision is made as to whether or not said pattern at the surface of the test piece is acceptable based upon results of the logical OR.

A surface inspection apparatus that conducts an inspection of a pattern formed at a surface of a test piece, comprising:

• a stage that holds the test piece;
• an illumination device that irradiates illumination light onto the surface of the test piece;
• a light-receiving device that detects at least one of diffracted light, scattered light and reflected light from the test piece;
• a drive device the makes it possible to vary at least one of;
• an angle of inclination of said stage, a position of said illumination device and a position of said light-receiving device, in order to guide the light from the surface of the test piece to said light-receiving device under a plurality of different inspection conditions;
• and
• an arithmetic operation device that sets said plurality of inspection conditions, generates a plurality of sets of detection information in correspondence to said plurality of inspection conditions based upon the light detected by said light-receiving device, obtains a logical OR of said plurality of sets of detection information thus generated and makes a decision as to whether or not said pattern at the surface of the test piece is acceptable based upon results of said logical OR.

A surface inspection apparatus that conducts an inspection of a pattern formed at a surface of a test piece, comprising:

• a first illumination device that irradiates illumination light onto the surface of the test piece at a variable first angle of incidence;
• a second illumination device that irradiates illumination light from a light source formed in a slit onto the surface of the test piece at a second angle of incidence larger than said first angle of incidence;
• a light-receiving device that detects light originating from the surface of the test piece;
• and
• an arithmetic operation device that generates first detection information based upon light originating from the surface of the test piece through irradiation by said first illumination device detected by said light-receiving device, generates second detection information based upon light originating from the surface of the test piece through irradiation by said second illumination device detected by said light-receiving device, obtains a logical OR of said first detection information and said second detection information and makes a decision as to whether or not said pattern at the surface of the test piece is acceptable based upon results of said logical OR.

A recording medium having recorded therein a program employed in a surface inspection apparatus that conducts an inspection of a pattern formed at a surface of a test piece, said program comprising:

• a first instruction for setting a plurality of different inspection conditions;
• a second instruction for detecting light originating from the surface of the test piece by irradiating illumination light onto the surface of the test piece under each of said plurality of inspection conditions;
• a third instruction for generating a plurality of sets of detection information corresponding to said plurality of inspection conditions based upon the detected light;
• a fourth instruction for obtaining a logical OR of said plurality of sets of detection information;
• and
• a fifth instruction for making a decision as to whether or not said pattern at the surface of the test piece is acceptable based upon results of said logical OR.

A data signal embodied in a carrier wave comprising a program employed in a surface inspection apparatus that conducts an inspection of a pattern formed at a surface of a test piece, said program comprising:

• a first instruction for setting a plurality of different inspection conditions;
• a second instruction for detecting light originating from the surface of the test piece by irradiating illumination light onto the surface of the test piece under each of said plurality of inspection conditions;
• a third instruction for generating a plurality of sets of detection information corresponding to said plurality of inspection conditions based upon the detected light;
• a fourth instruction for obtaining a logical OR of said plurality of sets of detection information;
• and
• a fifth instruction for making a decision as to whether or not said pattern at the surface of the test piece is acceptable based upon results of said logical OR.