X-ray microscope

Abstract

X-ray microscope comprise extended X-ray source, as well as means for placement of test object 3 and recording means, and located between them X-ray capillary lens. Channels of the latter are diverging towards recording means. Means for placement of the test object is located between extended X-ray source and lesser end side of the X-ray capillary lens. The device is characterized in that the walls of the channels (14, 16) for radiation transmission have a coating or are made of material absorbing or scattering X-ray radiation, and have lateral surface shape of truncated cone or pyramid, or that of cylinder or prism. With specified choice of the material, phenomenon of total external reflection is excluded, while rectilinearity of longitudinal axes of the channels ensures their functioning as collimators. Therefore, channels capture radiation only from the fragments of the test object 3 situated exactly opposite their entrances. As compared with known device, possibility is excluded of radiation capture entering channel 18 at angles from zero to critical angle θc of total external reflection. Due to this, resolution is fully determined by technological possibilities of decreasing dimension of the channel entrance. The ability of using extended X-ray source allows to reduce substantially time of exposure with simultaneous decrease in the X-ray tube power.

Dependencies are inferred from the claim text.