Magnetic recording medium and magnetic memory apparatus
AssigneeHitachi, Ltd.
InventorsKenchi Ito, Jun Hayakawa
Life of this patent
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Abstract
Disclosed is a magnetic memory apparatus which comprises a patterned magnetic recording medium in which multilayered films each having a first magnetic layer, a nonmagnetic metal layer or a nonmagnetic insulating layer and a second magnetic layer deposited discretely on a conductive electrode layer formed on a substrate, and a cantilever array having a plurality of cantilevers each having a conductive chip at its distal end. This provides a magnetic solid memory apparatus that has a large memory capacity and a super fast transfer rate, the merits of a hard disk apparatus, and a nanostructure and low power consumption, which are the merits of a semiconductor memory.
Claims12
A magnetic memory apparatus comprising:
- a patterned magnetic recording medium in which multilayered nanostructures each having a first magnetic layer, a nonmagnetic metal layer or a nonmagnetic insulating layer and a second magnetic layer laminated in that order on a conductive electrode layer formed on a substrate are laid out apart from one another at substantially even pitches;
- and
- a cantilever array in which cantilevers having conductive chips at distal ends are laid out in an array and apart from one another in such a way as to be associated with said nanostructures, whereby information is written or read by a current supplied from that one of said conductive chips which is associated with a desired one of said nanostructures as that conductive chip is put in contact with said desired nanostructure.
A patterned magnetic recording medium in which pillar-like nanostructures each comprising a multilayered film showing a tunneling magnetoresistance effect or a multilayered film showing a giant magnetoresistance effect are surrounded by insulators in such a way as to be laid out apart from one another at substantially even pitches and are provided on a conductive electrode layer formed on a substrate.
A patterned magnetic recording medium in which pillar-like nanostructures each comprising a multilayered film having a lamination of a multilayered film showing a tunneling magnetoresistance effect and a multilayered film showing a giant magnetoresistance effect are surrounded by insulators in such a way as to be laid out apart from one another at substantially even pitches and are provided on a conductive electrode layer formed on a substrate.
A magnetic memory apparatus comprising:
- a patterned magnetic recording medium in which nanostructures each comprising a multilayered film showing a tunneling magnetoresistance effect and/or a multilayered film showing a giant magnetoresistance effect are surrounded by insulators in such a way as to be laid out apart from one another at substantially even pitches and are provided on a conductive electrode layer formed on a substrate;
- and
- a cantilever array in which cantilevers having conductive chips at distal ends are laid out in an array and apart from one another in such a way as to be associated with said nanostructures, whereby information is written or read by a current supplied from that one of said conductive chips which is associated with a desired one of said nanostructures as that conductive chip is put in contact with said desired nanostructure.
A magnetic recording method which uses a patterned magnetic recording medium in which nanostructures each comprising a multilayered film showing a tunneling magnetoresistance effect and/or a multilayered film showing a giant magnetoresistance effect are surrounded by insulators in such a way as to be laid out apart from one another at substantially even pitches and are provided on a conductive electrode layer formed on a substrate, and a cantilever array in which cantilevers having conductive chips at distal ends are laid out in an array and apart from one another in such a way as to be associated with said nanostructures, and writes digital information by inverting magnetization with 1 being a state where a resistance of said multilayered film is high while 0 is a state where said resistance is low, using a current supplied from that one of said conductive chips which is associated with a predetermined one of said nanostructures as that conductive chip is put in contact with said predetermined nanostructure.
A signal reading method which uses a patterned magnetic recording medium in which nanostructures each comprising a multilayered film showing a tunneling magnetoresistance effect and/or a multilayered film showing a giant magnetoresistance effect are surrounded by insulators in such a way as to be laid out apart from one another at substantially even pitches and are provided on a conductive electrode layer formed on a substrate, and a cantilever array in which cantilevers having conductive chips at distal ends are laid out in an array and apart from one another in such a way as to be associated with said nanostructures, and detects a level of a resistance of each multilayered pillar by putting that one of said conductive chips which is associated with a predetermined one of said nanostructures in contact with said predetermined nanostructure and causing a current whose value is smaller than that of a current by which magnetization of said multilayered film is inverted to flow from said conductive chip.
A method of fabricating a patterned magnetic recording medium in which nanostructures each comprising a multilayered film are surrounded by inorganic insulators in such a way as to be laid out apart from one another at substantially even pitches and are provided on a substrate by performing, in order, the steps of:
- forming a multilayered film showing a tunneling magnetoresistance effect or a multilayered film showing a giant magnetoresistance effect;
- forming a resist pattern on said multilayered film;
- etching said multilayered film using said resist pattern as a mask;
- removing said resist pattern;
- forming an inorganic insulating film on said etched multilayered film;
- and
- planarizing said inorganic insulating film by chemical mechanical polishing (CMP).
Dependencies are inferred from the claim text.