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US 2004/0061850 A1Published application
Illumination and image acquisition system
AssigneeOrbotech Ltd.
InventorsDavid Fisch, Yigal Katzir
Life of this patent
Estimating the term…
Abstract
An inspection illuminates a generally specular surface of an electrical circuit with flashes of light. The flashed light comes form at least two spectrally different sources, and is temporally spaced. A camera forms an optical image of the circuit for each flash of light. Optical images are combined to provide a combined image. An analysis of the combined image can detect defects, and production related decisions may be based on this analysis.
Claims43
An inspection system comprising:
- an illuminator illuminating a portion of a pattern formed on a generally specular surface to be imaged, said illuminator providing at least two spectrally different and temporally spaced flashes of light, each flash of light being incident on said portion at generally the same angles of incidence;
- a camera arranged to receive light from said flashes and reflected by said portion of said generally specular surface to acquire at least one optical image of said portion per flash;
- and
- an image combiner operative to combine images acquired from different flashes to produce a combined image.
1 more element
An imager comprising:
- an illuminator illuminating a portion of a generally specular surface to be imaged, said illuminator providing at least two spectrally different and temporally spaced flashes of light, each flash of light being incident on said surface at generally the same angles of incidence;
- a camera arranged to receive light from said flashes and reflected by said portion of said generally specular surface to acquire at least one optical image of said portion per flash;
- and
- an image combiner operative to combine images acquired from different flashes to produce a combined image.
1 more element
A method for inspecting surfaces for defects, comprising:
- illuminating a portion of a generally specular surface to be inspected with at least two spectrally different and temporally spaced flashes of light, each flash of light being incident on said surface at generally the same angles of incidence;
- acquiring a first optical image of said portion of said surface illuminated by a first flash among said at least two spectrally different and temporally spaced flashes;
- acquiring a second optical image of said portion of said surface being illuminated by a second flash among said at least two spectrally different and temporally spaced flashes;
- and
- combining said first optical image and said second optical image to generate a combined image.
2 more elements
A method for fabricating electrical circuit, comprising:
- forming at least a portion of an electrical circuit on a substrate;
- illuminating said portion with at least two spectrally different and temporally spaced flashes of light, each flash of light being incident on said substrate at generally the same angles of incidence;
- acquiring a first optical image of said portion during a time interval in which said surface is illuminated by a first flash among said at least two spectrally different and temporally spaced flashes;
- acquiring a second optical image of said portion during a time interval in which said surface is illuminated by a second flash among said at least two spectrally different and temporally spaced flashes;
- combining said first optical image and said second optical image to form a combined image;
- inspecting said combined image;
- and
- in response to said inspecting, performing a post inspection operation.
5 more elements
Dependencies are inferred from the claim text.