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US 2004/0061618 A1Published application
Sensing of mirror position in an optical switch
AssigneeLucent Technologies Inc.
InventorMartin Haueis
Life of this patent
Estimating the term…
Abstract
A MEMS device employed in an optical switch has a position sensor configured to determine mirror orientation in the device. The position sensor includes at least one light sensor located under an etch gap defining the mirror in the switch. Change of light intensity at each light sensor due to the change in separation corresponding to the etch gap during mirror motion is measured and related to the mirror deflection angle. Information about the angle may be used to provide feedback to the motion actuator, which then may be operated to orient the mirror more accurately.
Claims15
A MEMS device, comprising:
- a stationary part;
- and
- a movable part movably coupled to the stationary part, wherein the stationary part includes a first light sensor adapted to generate a first electrical signal that indicates position of the movable part with respect to the stationary part in response to light impinging on the device.
A method comprising:
- receiving light at a MEMS device having a stationary part and a movable part movably coupled to the stationary part;
- and
- generating, with a first light sensor of the stationary part, a first electrical signal that indicates position of the movable part with respect to the stationary part in response to the light.
Dependencies are inferred from the claim text.