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US 2004/0061575 A1Published application
Surface acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsHajime Kando, Daisuke Yamamoto, Michio Kadota
Life of this patent
Estimating the term…
Abstract
A surface acoustic wave device includes a LiNbO3 substrate with a Euler angle in an area defined by a rectangle having four comers with coordinates (1) (0°, 7°, 101°), (2) (0°, 23°, 79°), (3) (0°, 23°, 79°), and (4) (0°, 7°, 79°), for example, and an electrode film made of Au, wherein surface acoustic waves including a longitudinal wave component as a main component are propagated thereon. The surface acoustic wave device uses longitudinal surface acoustic waves having a phase speed greater than with the “slow transverse wave”, and has a great electromechanical coupling coefficient and small propagation loss, and is suitable for handling high-frequency signals.
Claims27
A surface acoustic wave device comprising:
- a LiNbO3 substrate;
- and
- an electrode film made of one of Au and an alloy of Au as a principal component thereof and disposed on said LiNbO3 substrate;
- wherein p1 surface acoustic waves including a longitudinal wave component as a main component propagate along the LiNbO3 substrate, and a Euler angle of said substrate is a Euler angle located within areas A01 through A17 defined by a rectangle with four corners having coordinates (1), (2), (3), and (4) shown in the following table, or an Euler angle equivalent thereof:
- 4 AREA COORDINATES (1) COORDINATES (2) COORDINATES (3) COORDINATES (4) AREA A01 (0°, 7°, 101°) (0°, 23°, 101°) (0°, 23°, 79°) (0°, 70°, 79°) AREA A02 (0°, 75°, 101°) (0°, 92°, 101°) (0°, 92°, 79°) (0°, 75°, 79°) AREA A03 (0°, 146°, 155°) (0°, 168°, 155°) (0°, 168°, 120°) (0°, 146°, 120°) AREA A04 (0°, 146°, 60°) (0°, 168°, 60°) (0°, 168°, 25°) (0°, 146°, 25°) AREA A05 (10°, 6°, 94°) (10°, 12°, 94°) (10°, 23°, 67°) (10°, 6°, 67°) AREA A06 (10°, 77°, 96°) (10°, 93°, 96°) (10°, 93°, 72°) (10°, 77°, 72°) AREA A07 (10°, 139°, 162°) (10°, 164°, 162°) (10°, 164°, 107°) (10°, 139°, 107°) AREA A08 (10°, 150°, 62°) (10°, 171°, 62°) (10°, 171°, 33°) (10°, 150°, 33°) AREA A09 (20°, 7°, 84°) (20°, 24°, 84°) (20°, 24°, 61°) (20°, 7°, 61°) AREA A10 (20°, 78°, 93°) (20°, 95°, 93°) (20°, 95°, 46°) (20°, 78°, 46°) AREA A11 (20°, 127°, 167°) (20°, 163°, 167°) (20°, 163°, 118°) (20°, 127°, 118°) AREA A12 (20°, 153°, 67°) (20°, 172°, 67°) (20°, 172°, 40°) (20°, 153°, 40°) AREA A13 (30°, 10°, 76°) (30°, 25°, 76°) (30°, 25°, 51°) (30°, 10°, 51°) AREA A14 (30°, 41°, 156°) (30°, 58°, 156°) (30°, 58°, 133°) (30°, 41°, 133°) AREA A15 (30°, 80°, 93°) (30°, 100°, 93°) (30°, 100°, 24°) (30°, 80°, 24°) AREA A16 (30°, 139°, 156°) (30°, 122°, 156°) (30°, 122°, 133°) (30°, 139°, 133°) AREA A17 (30°, 170°, 76°) (30°, 155°, 76°) (30°, 155°, 51°) (30°, 170°, 51°)
2 more elements
A surface acoustic wave device comprising:
- a LiNbO3 substrate;
- and
- an electrode film made of one of Au and an alloy of Au as a principal component thereof and disposed on said LiNbO3 substrate;
- wherein
- surface acoustic waves including a longitudinal wave component as a main component propagate along the substrate, a Euler angle of said LiNbO3 substrate is (φ, θ, ψ), where ψ is between about −13° and about 13°, θ is between about 7° and about 23°, and ψ is between about 79° and about 101°, or a Euler angle equivalent thereof, and a ratio H/λ is between about 0.005 and about 0.06, where H is the thickness of said electrode film and λ is the wavelength of the surface acoustic wave.
2 more elements
A surface acoustic wave device comprising:
- a LiNbO3 substrate;
- and
- an electrode film made of one of Au and an alloy of Au as a principal component thereof and disposed on said LiNbO3 substrate;
- wherein
- surface acoustic waves including a longitudinal wave component as a main component propagate along the substrate, a Euler angle of said LiNbO3 substrate is (φ, θ, ψ) where φ is between about −6° and about 6°, θ is between about 14° and about 34°, and ψ is between about 84° and about 96°, or a Euler angle equivalent thereof, and a ratio H/λ is between about 0.005 and about 0.06 where H is the thickness of said electrode film and λ is the wavelength of the surface acoustic wave.
2 more elements
A surface acoustic wave device comprising:
- a LiNbO3 substrate;
- and
- an electrode film made of one of Au and an alloy of Au as a principal component thereof and disposed on said LiNbO3 substrate;
- wherein p1 surface acoustic waves including a longitudinal wave component as a main component propagate along the substrate, a Euler angle of said LiNbO3 substrate is (φ, θ, ψ) where φ is between about −6° and about 6°, θ between about 14° and about 23°, and ψ is between about 84° and about 96°, or a Euler angle equivalent thereof, and a ratio H/λ is between about 0.005 and about 0.06 where H is the thickness of said electrode film and λ is the wavelength of the surface acoustic wave.
1 more element
A surface acoustic wave device comprising:
- a LiNbO3 substrate;
- and
- an electrode film made of one of Au and an alloy of Au as a principal component thereof and disposed on said LiNbO3 substrate;
- wherein
- surface acoustic waves including a longitudinal wave component as a main component propagate along the substrate, a Euler angle of said LiNbO3 substrate is (φ, θ, ψ) where φ is between about 21.5° and about 38.5°, θ is between about 80° and about 100°, and ψ is between about 24.5° and about 91.8°, or a Euler angle equivalent thereof, and a ratio H/λ is between about 0.005 and about 0.08 where H is the thickness of said electrode film and λ is the wavelength of the surface acoustic wave.
2 more elements
A surface acoustic wave device comprising:
- a LiNbO3 substrate;
- and
- an electrode film made of one of Au and an alloy of Au as a principal component thereof and disposed on said LiNbO3 substrate;
- wherein
- surface acoustic waves including a longitudinal wave component as a main component propagate along the substrate, a Euler angle of said LiNbO3 substrate is (φ, θ, ψ) where φ is between about 21.5° and about 38.5°, θ is between about 80° and about 100°, and ψ is between about 1° and about 96.5°, or a Euler angle equivalent thereof, and a ratio H/λ is between about 0.005 and about 0.08 where H is the thickness of said electrode film and λ is the wavelength of the surface acoustic wave.
2 more elements
A surface acoustic wave device comprising:
- a LiNbO3 substrate;
- and
- an electrode film made of one of Au and an alloy of Au as a principal component thereof and disposed on said LiNbO3 substrate;
- wherein p1 surface acoustic waves including a longitudinal wave component as a main component propagate along the substrate, a Euler angle of said LiNbO3 substrate is (φ, θ, ψ) where φ is about −42° and about 42°, θ is between about 74.8° and about 94.2°, and ψ is between about 77° and about 103°, or a Euler angle equivalent thereof, and a ratio H/λ is between about 0.005 and about 0.077 where H is the thickness of said electrode film and λ is the wavelength of the surface acoustic wave.
1 more element
A surface acoustic wave device comprising:
- a LiNbO3 substrate;
- and
- an electrode film made of one of Au and an alloy of Au as a principal component thereof and disposed on said LiNbO3 substrate;
- wherein
- surface acoustic waves including a longitudinal wave component as a main component propagate along the substrate, and a ratio H/λ is between about 0.0125 and about 0.0267 where H is the thickness of said electrode film and λ is the wavelength of the surface acoustic wave.
2 more elements
A surface acoustic wave device comprising:
- a LiNbO3 substrate;
- and
- an electrode film made of one of Au and an alloy of Au as a principal component thereof and disposed on said LiNbO3 substrate;
- wherein
- surface acoustic waves including a longitudinal wave component as a main component propagate along the substrate, and a Euler angle of said LiNbO3 substrate is (φ, θ, ψ) where φ is between about 85° and about 95°, θ is between about 85° and about 95°, and ψ is between about 30° and about 130°, or a Euler angle equivalent thereof.
2 more elements
Dependencies are inferred from the claim text.