Monolithic vibration isolation and an ultra-high q mechanical resonator
AssigneeThe United States of America as represented by the Secretary of the Navy
InventorsDouglas Photiadis, Angie Sarkissian
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Abstract
A mechanical oscillator is provided for use in micro-electromechanical systems (MEMS) for application in radio frequency filters and oscillators, motion and pressure sensors and other micro applications. The oscillator is of monolithic construction and has a high Q with little energy loss because of teeth attached to the oscillating member which contain energy and prevent losses.
Claims13
A mechanical oscillator for a micro-electromechanical system comprising:
- a torsional member displaced around an axis;
- a connecting arm jointed to said torsional member and joined to a stationary base;
- teeth connected to and projecting from said connecting arm for reflecting energy lost from said torsional member when said member is displaced.
A mechanical oscillator for a micro-electromechanical system comprising:
- a vibrating flexural member;
- a connecting arm jointed to said flexural member and joined to a stationary base;
- teeth connected to and projecting from said connecting arm for reflecting energy radiated from said flexural member when said member is displaced.
A method of monolithic vibration isolation in a micro-electromechanical system comprising the steps of
- applying a force to a member capable of flexing or torquing said member;
- damping said force;
- and
- reflecting energy within said member by means of teeth attached to said member.
Dependencies are inferred from the claim text.