Flexible MEMS transducer and manufacturing method thereof, and flexible MEMS wireless microphone

A method for manufacturing a flexible MEMS transducer comprising:

• forming a sacrificial layer on a flexible substrate;
• depositing a membrane layer on the sacrificial layer by plasma enhanced chemical vapor deposition (PECVD), followed by patterning;
• depositing a lower electrode layer on the membrane layer, and patterning the lower electrode layer;
• sequentially depositing an active layer and an upper electrode layer on the lower electrode layer and sequentially patterning the upper electrode layer and the active layer;
• forming a first connecting pad to be connected to the lower electrode layer and a second connecting pad to be connected to the upper electrode layer;
• and
• removing the sacrificial layer.

A flexible wireless MEMS microphone, comprising:

• a substrate of a flexible polymeric material;
• a flexible MEMS transducer structure formed on the substrate by plasma enhanced chemical vapor deposition (PECVD);
• an antenna printed on the substrate for communicating with an outside source;
• a wire and interface circuit embedded in the substrate to electrically connect the flexible MEMS transducer and the antenna;
• a flexible battery layer electrically connected to the substrate for supplying power to the MEMS transducer;
• and
• a flexible bluetooth module layer electrically connected to the battery layer.

A flexible MEMS wireless microphone comprising

• a flexible substrate, which has a flexible MEMS transducer structure formed by plasma enhanced chemical vapor deposition (PECVD), an antenna printed thereon to be electrically connected to the MEMS transducer structure and for communicating with an outside source and a wire and interface circuit embedded therein for electrically connecting the flexible MEMS transducer and antenna;
• a flexible battery layer electrically connected to the flexible substrate;
• and
• a bluetooth module layer, which are sequentially deposited to a predetermined thickness.

A method for manufacturing a flexible MEMS transducer, comprising:

• forming a sacrificial layer on a flexible substrate;
• sequentially depositing on the sacrificial layer by a plasma enhanced chemical vapor deposition (PECVD) process, a membrane layer, a lower electrode layer, an active layer and an upper electrode layer;
• sequentially patterning the upper electrode layer, the active layer and the lower electrode layer;
• depositing an upper protective layer to cover the upper electrode layer, the lower electrode layer and the active layer;
• patterning the upper protective layer for a connection of the lower electrode layer and of the upper electrode layer, depositing a connecting pad layer, and patterning the connecting pad layer to form a first connecting pad to be connected with the lower electrode layer and a second connecting pad to be connected with a connection part of the upper electrode layer;
• and
• patterning the membrane layer to expose the sacrificial layer and removing the sacrificial layer.