Vacuuming motor and vacuuming apparatus
AssigneeKabushiki Kaisha Yaskawa Denki
InventorsKenichi Tachibana, Tadataka Noguchi, Toshio Omata
Life of this patent
Estimating the term…
Abstract
In a vacuuming motor used by being attached to a peripheral edge of a motor attaching hole provided at a vacuum chamber, an end portion on a load side of a motor main body is attached with a reduction gear main body having an attaching flange fixed to the motor attaching hole to interpose an O-ring therebetween and the attaching flange is fixed with vacuum seals and constituted by a resin and brought into contact with an output shaft of the reduction gear main body for partitioning an inner space of the reduction gear main body and the motor main body and an inner space of the vacuum chamber.
Claims3
A vacuuming motor, for being attached to a peripheral edge of a motor attaching hole of a vacuum chamber, comprising:
- a reduction gear main body attached to an end portion on a load side of a motor main body, including an attaching flange fixed to the motor attaching hole to interpose an O-ring therebetween;
- and
- a vacuum seal fixed to the attaching flange, made of resin, contacting slidably with an output shaft of a reduction gear, for partitioning an inner space of the reduction gear main body and the motor main body and an inner space of the vacuum chamber.
A vacuuming apparatus comprising:
- a vacuum chamber having a motor attaching hole therein;
- a motor main body;
- a reduction gear main body attached between the motor main body and a vacuum chamber, including an attaching flange attached to a peripheral edge of the motor attaching hole of the vacuum chamber via an O-ring,
- vacuum seals fixed to an inner surface of the attaching flange on two portions apart in an axial direction of an output shaft of a reduction gear, contacting slidably with the output shaft of the reduction gear,
- a middle sucking port for vacuuming air at an interval between the vacuum seals.
Dependencies are inferred from the claim text.