Electron emission element
AssigneesSumitomo Electric Industries, Ltd., Japan Fine Ceramics Center
InventorsYoshiki Nishibayashi, Yutaka Ando, Takahiro Imai
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Abstract
An electron emission element according to the present invention comprises a substrate, and a plurality of protrusions composed of diamond and protruding from the substrate. Each protrusion includes a columnar portion, the side face of which forms an inclination of approximately 90° relative to the surface of the substrate, and a tip portion, which is located on the columnar portion having a spicular end. A conductive layer is formed on the upper part of each columnar portion, and a cathode electrode film, which is electrically connected to the conductive layer, is formed on the side face of the columnar portion.
Claims10
An electron emission element comprising, a substrate, and a plurality of protrusions, composed of diamond, protruding from the substrate:
- wherein each of the protrusions comprises,
- a tip portion, having a sharp end, which is located at the top end of the protrusion, and
- a columnar portion, the side face of which extends upward relative to the surface of the substrate, and which is located below the tip portion;
- and
- wherein side face of each of the columnar portions of the protrusions is provided with a cathode electrode film, which is electrically connected to a conductive layer included in the protrusion.
Dependencies are inferred from the claim text.