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US 2004/0056579 A1Published application
Patterned seed layer suitable for electron-emitting device, and associated fabrication method
AssigneecDream Corporation
InventorsChang Chul Ha, Son Jong Woo, Kim Jung Jae
Life of this patent
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Abstract
An electron-emitting device contains an emitter seed layer patterned into multiple laterally separated sections situated between the electron-emissive elements, on one hand, and emitter electrodes, on the other hand. Sections of the seed layer are spaced apart along each emitter electrode to electrically decouple electron emission elements disposed on the seed layer.
Claims12
A device comprising:
- an emitter electrode;
- a resistor layer;
- a patterned electrically conductive seed layer overlying part of the resistor layer;
- a dielectric layer overlying the resistive layer;
- a gate electrode overlying the dielectric layer above the resistive layer and having lateral edges in approximate vertical alignment with lateral edges of the dielectric layer;
- and
- a carbon based electron-emissive element (a) positioned over the seed layer above the emitter electrode and (b) situated in a composite opening extending through the gate electrode and the dielectric layer.
4 more elements
A device comprising:
- a group of laterally separated emitter electrodes;
- an electrically resistive layer overlying parts of the emitter electrodes;
- a dielectric layer overlying the resistive layer;
- a plurality of laterally separated gate electrodes overlying the dielectric layer above the resistive layer;
- and
- a multiplicity of electron-emissive elements (a) positioned over a patterned seed layer above the emitter electrodes and (b) situated in composite openings extending through the gate electrodes and the dielectric layer.
3 more elements
A carbon based emitter fabrication method comprising:
- furnishing and initial structure in which (a) an emitter electrode overlies a glass substrate, (b) a gate electrode overlies a dielectric layer that overlies a resistor layer and (c) a group of electron-emissive elements is disposed on a seed layer in a composite opening extending through the gate electrode and the dielectric layer;
- and
- patterning the seed layer to form a plurality strips, each one of said plurality of strips underlying a set of the electron-emissive elements.
Dependencies are inferred from the claim text.