Multibeam generating apparatus and electron beam drawing apparatus
AssigneeCanon Kabushiki Kaisha
InventorsMasahiko Okunuki, Hiroya Ohta, Norio Saito, Masaki Takakuwa, Sayaka Tanimoto, Takeshi Haraguchi
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Abstract
This invention provides a multielectron gun which generates a plurality of electron beams having uniform characteristics. A multielectron gun (2) is formed of a plurality of electron guns (2a-2c). The electron gun (2a) has, in addition to an electron source (21a), Wehnelt electrode (22a), and anode electrode (23), a shield electrode (24) between the Wehnelt electrode (22a) and anode electrode (23). The shield electrode reduces field interference among the electron guns.
Claims15
A multibeam generating apparatus for generating a plurality of electron beams, comprising:
- a plurality of electron generators;
- an acceleration electrode which forms an acceleration field for accelerating an electron emitted from each one of said plurality of electron generators;
- and
- a shield electrode at least part of which is arranged between said plurality of electron generators and said acceleration electrode.
Dependencies are inferred from the claim text.