Stable high temperature sensor system with tungsten on AlN
AssigneeHeetronix
InventorJames D. Parsons
Life of this patent
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Abstract
A sensor system has an AlN substrate, a W layer on the substrate, a signal source adapted to apply an electrical actuating signal to the W layer, and a sensor adapted to sense the response of the W layer. The W layer can comprise a thin film, with various types of optional protective layers over the film. Applications include sensing temperature, fluid flow rates, fluid levels, pressure and chemical environments. For a planar heater, the W layer comprises a plurality of conductive strands distributed on the substrate, with the strands generally parallel and serpentine shaped for a rectangular substrate, and extending along respective lines of longitude that merge at opposite poles of the substrate for a circular substrate.
Claims69
A sensor system, comprising:
- an AlN substrate,
- a W layer on said substrate,
- a signal source adapted to apply an electrical actuating signal to said W layer, and
- a sensor adapted to sense the response of said W layer to said actuating signal.
A system, comprising:
- an AlN substrate,
- a conductive layer on said substrate which, over a predetermined temperature operating range, has an expansion coefficient within 1.00+/−0.07 of said substrate, is substantially non-reactive with said substrate, and exhibits substantially no solid-solubility or interdiffusivity with said substrate,
- a signal source adapted to apply an electrical actuating signal to said conductive layer, and
- a sensor adapted to sense the response of said conductive layer to said actuating signal.
A sensor system, comprising:
- an insulative substrate,
- a W conductive layer on said substrate which, over a predetermined temperature operating range, has an expansion coefficient within 1.00+/−0.07 of said substrate, is substantially non-reactive with said substrate, and exhibits substantially no solid-solubility or interdiffusivity with said substrate,
- a signal source adapted to apply an electrical actuating signal to said W layer, and
- a sensor adapted to sense the response of said conductive layer to said actuating signal.
An electrical circuit element, comprising:
- an AlN substrate, and
- a W thin film layer on said substrate.
A sensing method, comprising:
- applying an electrical actuating signal to a W layer on an AlN substrate, and
- sensing the response of said W layer to said actuating signal.
Dependencies are inferred from the claim text.