Deflection method and system for use in a charged particle beam column

An electrostatic lens for use in a lens arrangement of a focusing/deflecting assembly in a charged particle beam column for inspecting a sample, wherein the focusing deflecting assembly comprises a magnetic deflector, the electrostatic lens comprising an electrode that is formed with an opening for a charged particle beam passage therethrough and is made of a non-magnetic metal;

• and comprising a pole piece assembly made of a soft magnetic material surrounding said electrode.

A focusing/deflecting assembly for use in a charged particle beam column for inspecting a sample, wherein:

• the focusing/deflecting assembly comprises a lens arrangement and a deflection system;
• the lens arrangement comprises an objective magnetic lens and an electrostatic lens having an electrode made of a non-magnetic metal and formed with an opening for a charged particle beam passage therethrough, said electrode being accommodated downstream of the magnetic objective lens with respect to a direction of a charged particle beam propagation towards the sample, such that an optical axis of the lens arrangement intersects with said opening;
• the deflection system comprises a magnetic deflector and a pole piece assembly having a portion made of a soft magnetic material which surrounds said electrode of the electrostatic lens.

A method of controlling a beam propagation through a lens arrangement of a charged particle beam column for inspecting a sample, the method comprising:

• creating a magnetic deflecting field;
• and
• conducting at least a portion of said magnetic field towards an optical axis of the lens arrangement.

A method of controlling a beam propagation through a lens arrangement of a charged particle beam column for inspecting a sample, the method comprising:

• creating a magnetic deflecting field by a magnetic deflector having excitation coils and pole pieces;
• conducting at least a portion of said magnetic field towards an optical axis of the lens arrangement by means of a pole piece assembly having a magnetic contact surface with the pole pieces of the magnetic deflector.