Apparatus and method for improved electroforming
AssigneeDigital Matrix
InventorAlex Greenspan
Life of this patent
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Abstract
The present invention includes an apparatus and method for providing optimal uniformity of deposition during an electroplating process. The system may include an agitating device which is configured to provide agitation to the anode basket, a bias current distributed over a control grid (e.g., titanium mesh) which is disposed between the anode and cathode, wherein the control grid is configured to substantially reduce the variation in the electric field across the cathode, a cathode which includes a backplate having a contact ring wherein the contact ring includes a device configured to increase the pressure of the contact ring against the backplate and/or a cathode mounted on a lead screw for providing axial movement of the cathode along an axis normal to the anode.
Claims18
An apparatus for facilitating the uniformity of deposition in an electroforming process, wherein said apparatus includes an anode basket, a cathode facing said anode and a control grid between said anode and cathode, wherein said control grid is configured to substantially reduce the variation in the electric field across said cathode:
An apparatus for controlling the uniformity of deposition in an electroforming process, said apparatus including an anode, a cathode assembly facing said anode, said cathode assembly comprising a backplate having a contact ring, said contact ring includes a device configured to increase the pressure of said contact ring against said backplate.
An apparatus for facilitating the uniformity of deposition in an electroforming process, wherein said apparatus includes a rotating anode and at least one of a stationary cathode and a rotating cathode facing said anode.
An apparatus for facilitating the uniformity of deposition in an electroforming process, wherein said apparatus includes an anode basket, a cathode facing said anode and an agitating device which is configured to provide agitation to said anode basket.
An apparatus for facilitating the uniformity of deposition in an electroforming process, wherein said apparatus includes:
- an anode;
- a cathode facing said anode;
- an agitating device which is configured to provide agitation to said anode basket;
- a control grid between said anode and cathode, wherein said control grid is configured to substantially reduce the variation in the electric field across said cathode, said control grid coupled to a circuit which is configured to distribute a bias current over said control grid;
- and,
- said cathode comprising a backplate having a contact ring, said contact ring includes a device configured to increase the pressure of said contact ring against said backplate.
Dependencies are inferred from the claim text.