Stamper forming method
AssigneeProdisc Technology Inc.
InventorsKuo-Hsin Teng, Hao-Chia Liao
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Abstract
A stamper forming method, including the following steps: coating a first photoresist on a substrate, coating a stop layer on the first photoresist, coating a second photoresist on the stop layer, exposing the second photoresist by using a beam of light, exposing the first photoresist by using another beam of light, developing the first photoresist and the second photoresist, and sputtering a metal layer over the second photoresist. The invention also discloses another stamper forming method.
Claims18
A stamper forming method for making a stamper, comprising the steps of:
- coating a first photoresist on a substrate;
- coating a stop layer on the first photoresist;
- coating a second photoresist on the stop layer;
- exposing the second photoresist by using a beam of light;
- exposing the first photoresist by using another beam of light;
- developing the first photoresist and the second photoresist;
- and
- sputtering a metal layer forward the second photoresist.
A stamper forming method for making a stamper, comprising the steps of:
- coating a first photoresist on a substrate;
- coating a first stop layer on the first photoresist;
- coating a second photoresist on the first stop layer;
- coating a second stop layer on the second photoresist;
- coating a third photoresist on the second stop layer;
- exposing the third photoresist by using a beam of light;
- exposing the second photoresist by using another beam of light;
- exposing the first photoresist by using yet another beam of light;
- developing the first photoresist, the second photoresist, and the third photoresist;
- and
- sputtering a metal layer forward the third photoresist.
Dependencies are inferred from the claim text.