Electrostatic chuck having a low level of particle generation and method of fabricating same
AssigneeApplied Materials, Inc.
InventorsWendell G. Boyd JR., Jose-Antonio Marin, Ho T. Fang
Life of this patent
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Abstract
An electrostatic chuck having either a conformal or non-confomal coating upon a surface for supporting a substrate. The coating reduces a number of particles generated by the electrostatic chuck.
Claims38
An electrostatic chuck for supporting electrostatically a workpiece, comprising:
- a chuck body having a support surface to support the workpiece;
- and
- a coating of poly-para-xylylene disposed upon the support surface.
A method of fabricating an electrostatic chuck for supporting electrostatically a workpiece, comprising the steps of:
- supplying an electrostatic chuck having a support surface;
- and
- depositing a coating of poly-para-xylylene upon the support surface.
A system for processing semiconductor wafers comprising:
- a process chamber;
- a substrate support pedestal, positioned within said process chamber for supporting a substrate for a processing within said process chamber, wherein said substrate support pedestal comprises an electrostatic chuck having a support surface and a coating of poly-para-xylylene upon the support surface.
An electrostatic chuck for supporting electrostatically a workpiece, comprising:
- a chuck body having a support surface to support the workpiece;
- and
- a diamond-like carbon coating disposed upon the support surface.
A method of fabricating an electrostatic chuck for supporting electrostatically a workpiece, comprising the steps of:
- supplying an electrostatic chuck having a support surface;
- and
- depositing a coating of diamond-like carbon upon the support surface.
A system for processing semiconductor wafers comprising:
- a process chamber;
- a substrate support pedestal, positioned within said process chamber for supporting a substrate for a processing within said process chamber, wherein said substrate support pedestal comprises an electrostatic chuck having a support surface and a coating of diamond-like carbon upon the support surface.
Dependencies are inferred from the claim text.