Acceleration sensor and method for manufacturing an acceleration sensor
AssigneeInfineon Technologies AG
InventorsStefan Kolb, Wolfgang Werner
Life of this patent
Estimating the term…
Abstract
An acceleration sensor includes a deflectable pressure measuring diaphragm and a counter-structure, which is deflectable as against the pressure measuring diaphragm. The acceleration sensor includes a detection means for detecting a deflection of the pressure measuring diaphragm as against the counter-structure. Further, a test mass is connected to the pressure measuring diaphragm or the counter-structure in order to be deflected from an idle position depending on an acceleration applied. The deflection of the test mass results in a change of the distance between the pressure measuring diaphragm and the counter-structure, which is detectable by the detection means.
Claims23
Acceleration sensor comprising:
- a pressure measuring diaphragm;
- a counter-structure spaced from the pressure measuring diaphragm;
- a test mass which is connected to the pressure measuring diaphragm or to the counter-structure in order to be deflected from an idle position depending on the acceleration applied, with a deflection of the test mass leading to a change of a distance between the pressure measuring diaphragm and the counter-structure;
- and
- a detection means for detecting the distance or the change of the distance between the pressure measuring diaphragm and the counter-structure.
Method for manufacturing an acceleration sensor from a pressure sensor structure with a pressure measuring diaphragm and a counter-structure, comprising the following steps:
- producing a test mass, which is connected to the pressure measuring diaphragm or the counter-structure, in order to be deflected from an idle position depending on an acceleration applied, with a deflection of the test mass resulting in a change of a distance between the pressure measuring diaphragm and the counter-structure;
- and
- providing a detection means for detecting the distance or the change of the distance of the pressure measuring diaphragm as against the counter-structure.
Acceleration sensor, comprising:
- a diaphragm;
- a counter-structure spaced apart from the diaphragm;
- an elastic test mass, which is connected to the diaphragm, in order to be deflected with respect to the counter-structure depending on the acceleration applied, with a deflection of the test mass resulting in a change in distance between the diaphragm and the counter-structure;
- and
- a detection means for detecting the change or the change of the distance between the diaphragm and the counter-structure.
Dependencies are inferred from the claim text.