Adjustable threshold isolation transistor
AssigneeAltera Corporation
InventorDominik J. Schmidt
Life of this patent
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Abstract
An method and apparatus for high voltage control of isolation region transistors (320) in an integrated circuit. Isolation region transistors (320) are formed between active devices by selective implantation of channel stop implants (140). Isolation region transistors (320) are those areas with a conductor (130) over an isolation region (120) with no channel stop implant (140). This provides an isolation region transistor (320) with a lower threshold voltage than the areas with channel stop implant (140). The voltage threshold of the isolation region transistors 320 are adjustable to a range of voltages by varying the length of channel stop implant (140). The apparatus may be fabricated using conventional fabrication processes.
Claims20
A method of forming an integrated circuit comprising:
- providing a first diffusion region, the first diffusion region a source/drain region of a first transistor;
- providing a second diffusion region, the second diffusion region a source/drain region of a second transistor;
- providing an isolation region between the first and second diffusion regions;
- and
- selectively implanting a first channel stop implant region and a second channel stop implant region in the isolation region, the first channel stop implant region separate from the second channel stop implant region.
A method of forming an integrated circuit comprising:
- growing a pad oxide layer on a substrate;
- growing a silicon nitride layer on the pad oxide;
- etching a first isolation region and a second isolation region from the silicon nitride layer and the pad oxide layer;
- depositing a spacer oxide;
- etching the spacer oxide to form a first opening and a second opening in the first isolation region, and a third opening in the second isolation region;
- implanting a first channel stop implant region in the first opening and a second channel stop implant region in the second opening in the first isolation region, and a third channel stop region in the third opening in the second isolation region;
- removing the remaining spacer oxide;
- growing a field oxide in the first isolation region and the second isolation region;
- removing the silicon nitride layer;
- depositing a polysilicon layer;
- etching the polysilicon layer;
- and
- implanting a plurality of diffusion regions.
A method of forming an integrated circuit comprising:
- providing a first diffusion region, the first diffusion region a source/drain region of a first transistor;
- providing a second diffusion region, the second diffusion region a source/drain region of a second transistor;
- providing a third diffusion region;
- providing an isolation region between the first, second and third diffusion regions;
- and
- selectively implanting a first channel stop implant region, a second channel stop implant region, and a third channel stop implant region in the isolation region, the first channel stop implant region, the second channel stop region, and the third channel stop region separate from each other.
Dependencies are inferred from the claim text.