Method of fabricating liquid crystal display device
AssigneeLG. Philips LCD Co., Ltd.
InventorIn Duk Song
Life of this patent
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Abstract
A method for forming a display device, includes forming a thin film transistor (TFT), a gate pad and a data pad on a substrate; depositing sequentially an inorganic insulating material and an organic insulating material on the substrate having the TFT, the gate pad and the data pad; selectively removing the organic insulating material using a diffracting mask to form a patterned organic insulating layer; selectively removing the inorganic insulating material, using at least a portion of the patterned organic insulating layer as a mask to define contact holes for the TFT, the gate pad and the data pad; and forming electrodes in the contact holes.
Claims5
A method for forming a display device, comprising:
- forming a thin film transistor (TFT), a gate pad and a data pad on a substrate;
- depositing sequentially an inorganic insulating material and an organic insulating material on the substrate having the TFT, the gate pad and the data pad;
- selectively removing the organic insulating material using a diffracting mask to form a patterned organic insulating layer;
- selectively removing the inorganic insulating material, using at least a portion of the patterned organic insulating layer as a mask to define contact holes for the TFT, the gate pad and the data pad;
- and
- forming electrodes in the contact holes.
Dependencies are inferred from the claim text.