Integrated micro-optical systems
AssigneeTessera North America, Inc.
InventorsMichael R. Feldman, Alan D. Kathman, William H. Welch
Life of this patent
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Abstract
An integrated micro-optical system includes at least two wafers with at least two optical elements provided on respective surfaces of the at least two wafers, at least one of the two optical elements being a spherical lens. The resulting optical system presents a high numerical aperture. One of the optical elements may be a refractive element formed in a material having a high index of refraction.
Claims25
An integrated micro-optical apparatus comprising a die formed from more than one wafer bonded together, each wafer having a top surface and a bottom surface, bonded wafers being diced to yield multiple die, at least two optical elements being formed on respective surfaces of each die, at least one of said at least two optical elements being a spherical lens, a resulting optical system of each die having a high numerical aperture.
A method for forming an integrated micro-optical apparatus comprising:
- bonding a first wafer and a second wafer together, each wafer having a top surface and a bottom surface;
- etching a plurality of holes in said first wafer;
- placing a round spherical lens in each of said holes of said first wafer;
- dicing bonded first and second wafers to yield multiple dies;
- and
- before said dicing, forming at least one optical element on one of the top surface and the bottom surface of said second wafer.
Dependencies are inferred from the claim text.