Micro-mirror with rotor structure

An array of micro mirrors, comprising:

• a plurality of micro mover devices, each having a micro mirror for selectively deflecting an input beam of light from an input device to an output device;
• each said micro mover device comprising:
• a stator structure having a set of radial stator electrodes;
• a rotor structure having a set of radial rotor electrodes, the mirror mounted on the rotor structure;
• a flexure structure suspending the rotor structure relative to the stator structure.

A micro mirror device, comprising:

• a stator structure having a set of radial stator electrodes;
• a rotor structure having a set of radial rotor electrodes;
• a mirror mounted on the rotor structure;
• and
• means for suspending the rotor structure relative to the stator structure and allowing radial movement of the rotor structure in a range of movement about a rotor axis.

A raster-scanning display system, comprising:

• a generator for generating an optical beam;
• a first micro mirror device responsive to line control signals for deflecting the optical beam along a line to produce a first deflected beam;
• a second micro mirror device, responsive to frame control signals for deflecting the first deflected beam to produce a second deflected beam;
• a controller for controlling the generator and for producing the line control signals and the frame control signals;
• the first and second micro mirror devices each including:
• a stator structure having a set of radial stator electrodes;
• a rotor structure having a set of radial rotor electrodes;
• a mirror mounted on the rotor structure;
• and
• a flexure structure suspending the rotor structure relative to the stator structure.

A display system, comprising:

• a generator for generating an optical beam;
• a first micro mirror device responsive to first control signals for deflecting the optical beam to produce a first deflected beam;
• a fixed mirror system for redirecting the first deflected beam as a second deflected beam;
• a second micro mirror device responsive to second control signals for deflecting the second deflected beam to produce a third deflected beam;
• a controller for controlling the generator and for producing the first and second control signals;
• the first and second micro mirror devices each including:
• a stator structure having a set of radial stator electrodes;
• a rotor structure having a set of radial rotor electrodes;
• a mirror mounted on the rotor structure;
• and
• a flexure structure suspending the rotor structure relative to the stator structure.

A method of making a micro mirror device, comprising:

• forming a radial stator electrode pattern on a stator substrate;
• forming a radial rotor electrode pattern on a first surface of a rotor portion of a rotor substrate;
• etching the rotor substrate to define a flexure structure connecting the rotor portion to the rotor substrate;
• etching a second surface of the rotor portion along a substrate crystal plane to define a mirror surface;
• aligning the stator substrate with the rotor substrate such that the first surface of the rotor portion faces the stator substrate;
• and
• bonding the rotor substrate to the stator substrate.