US 2004/0016882 A1 · Scanning electron microscope

Abstract

An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a finction for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Claims1

Dependent claims

A scanning electron microscope for detecting a pattern on the basis of electrons obtained by scanning an electron beam on a sample and identifying a desired position on the basis of said detected pattern and a pattern registered beforehand, wherein:

said microscope has means for setting information concerning a pattern kind, an interval between a plurality of parts constituting said pattern, and a size of parts constituting said pattern and
means for forming a pattern image composed of a plurality of parts on the basis of said information obtained by said means.

Dependencies are inferred from the claim text.

Facts

Application

10/615,864Filed 10 Jul 2003

Priority

JP 2000-5802229 Feb 2000

Published

29 Jan 2004

Term ends

Not estimatedThe source records don’t support an estimate.

Classification10 codes

H01J 37/28
Electron or ion microscopes; Electron or ion diffraction tubes: with scanning beams
G01N 23/225
By measuring secondary emission from the material: using electron or ion
G06T 7/74
Using feature-based methods: involving reference images or patches
H01J 37/222
Optical , image processing or photographic arrangements associated with the tube: image processing arrangements associated with the tube

Family

Application09/792,721Continuation · filed 23 Feb 2001

Application10/615,864Continuation · filed 10 Jul 2003

US 2001/0019109 A1Published application

US 6,627,888 B2Related patent

US 6,803,573 B2Related patent

US 2004/0016882 A1This patent

From the US filing history. Foreign family members aren’t listed.

Scanning electron microscope

Life of this patent

Scanning electron microscope

Life of this patent

Abstract

Claims1