System for and method of custom microfilter design with beamsplitter characterization
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsXinbing Liu, Chen-Hsiung Cheng
Life of this patent
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Abstract
A microfilter design system for use with a laser drilling system producing multiple sub-beams for parallel drilling operations includes an optical intensity detector illuminated by the multiple sub-beams of the laser drilling system. An analysis module operates the optical intensity detector to produce intensity measurement data for each of the multiple sub-beams. A memory operable with a data processing system stores the intensity measurement data for analysis.
Claims34
A microfilter design system for use with a laser drilling system producing multiple sub-beams for parallel drilling operations;
- comprising:
- an optical intensity detector illuminated by the multiple sub-beams of the laser drilling system;
- an analysis module operating said optical intensity detector to produce intensity measurement data for each of the multiple sub-beams;
- and
- a memory operable with a data processing system and storing the intensity measurement data for analysis.
A method of designing a microfilter for use with a laser drilling system producing multiple sub-beams for parallel drilling operations, comprising:
- illuminating an optical intensity detector with the multiple sub-beams of the laser drilling system;
- measuring the intensities of each of the multiple sub-beams with the optical intensity detector;
- and
- designing a microfilter based on the measured intensities.
A method for providing sub-beam impingement intensity control from a set of sub-beams generated from a parallel process laser system and impinged upon a target, at least two of said sub-beams having an impingement separation at said target of less than about 260 microns, comprising the step of:
- independently attenuating the intensity of each sub-beam in said sub-beam set in response to a measurement of the impingement intensity of that sub-beam.
A method for providing sub-beam impingement intensity control from a set of sub-beams generated from a parallel process laser system and impinged upon a target, at least two of said sub-beams having an impingement separation at said target of less than about 260 microns, comprising the step of:
- measuring the impingement intensity of a sub-beam to generate a sub-beam intensity measurement;
- and
- attenuating the intensity of said sub-beam responsive to said measurement.
A method for making an inkjet nozzle, comprising the steps of:
- providing a laser drilling system having a laser for generating a plurality of sub-beams for drilling holes in an inkjet nozzle foil according to a hole target pattern;
- measuring the impingement intensity of each sub-beam on a target to generate a respective sub-beam intensity measurement;
- using all said intensity measurements to make a microfilter;
- positioning said microfilter between said pattern and said target to attenuate the intensity of each said sub-beam;
- placing said foil into a position commensurate with the position of said target;
- and
- operating said laser system to drill said foil and thereby make said nozzle.
A laser drilling apparatus for providing sub-beam impingement intensity control from a set of sub-beams impinged upon a target, at least two of said sub-beams having an impingement separation at said target of less than about 260 microns, comprising:
- means for independently attenuating the intensity of each sub-beam in said sub-beam set in response to a measurement of the impingement intensity of that sub-beam.
Dependencies are inferred from the claim text.