Monolithic sputtering target assembly
OwnerRobert B. Ford, Christopher A. Michalukinventors
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Abstract
A monolithic sputtering target assembly having a one piece assembly made from the same material is disclosed. Also disclosed are other sputtering target assemblies which have a backing plate and a sputtering target blank wherein the backing plate is made from or contains a metal, such as a valve metal, cobalt, titanium, or alloys thereof. Methods of recycling target assemblies are further disclosed as well as unique methods of providing target assemblies to fabricators.
Claims38
A monolithic sputtering target assembly comprising a one piece assembly made from the same metal.
A sputtering target assembly comprising a backing plate and a sputtering target blank, wherein said backing plate comprises a valve metal, cobalt, titanium, or alloys thereof, and said sputtering target blank comprises a metal.
Dependencies are inferred from the claim text.