Cleaning equipment and cleaning method

A cleaning equipment comprising:

• a cleaning solution tank for storing a cleaning solution;
• a cleaning bath in which cleaning of an object to be cleaned is carried out using the cleaning solution;
• a cleaning solution supply route for supplying the cleaning solution stored in the cleaning solution tank to the cleaning bath;
• a cleaning solution return route for returning the cleaning solution that has been supplied to the cleaning bath to the cleaning solution tank;
• a gas supply route for supplying a purge gas into the cleaning solution tank;
• and
• a gas discharge route for discharging the purge gas from the cleaning solution tank;
• wherein a cleaning solution discharge opening of the cleaning solution return route is immersed in the cleaning solution that is stored in the cleaning solution tank.