Megasonically energized liquid interface apparatus and method
OwnerB. Gene Cawlfieldinventor
Life of this patent
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Abstract
Apparatus and method for removing material adhering to a workpiece are disclosed. A process liquid and a discontinuous phase are placed in a process tank adapted to receive a workpiece. The interface between the process liquid and the discontinuous phase is energized with megasonic energy, and the interface is contacted with and moved relative to the workpiece in a linear direction at a controlled rate, preferably across all of the workpiece. Liquid in the interface is optionally removed from the process tank at predetermined times to remove entrained particles. Numerous drying schemes can be used to reduce or eliminate formation of droplets and to speed drying time.
Claims31
An apparatus for removing material adhering to a workpiece using the interface of a process liquid and an adjacent discontinuous phase comprising:
- a process tank having an interior designed to receive at least one workpiece, the process liquid, and the discontinuous phase;
- means for energizing the interface with megasonic energy;
- and means for producing relative movement between the interface and the workpiece at a controlled rate when the interface contacts the workpiece.
An apparatus for removing material adhering to a workpiece using the interface of a process liquid and an adjacent discontinuous phase comprising:
- a process tank having an interior designed to receive at least one workpiece, the process liquid, and the discontinuous phase;
- means for energizing the interface with megasonic energy;
- and means for producing relative linear movement between the interface and the workpiece in alternating directions at a controlled rate.
A method for removing material adhering to a workpiece, comprising the steps of:
- A) creating an interface between a process liquid and a discontinuous phase;
- B) energizing the interface with megasonic energy;
- C) contacting the workpiece with the energized interface and moving the energized interface relative to the workpiece at a controlled rate;
- and D) repeating step (C) a predetermined number of times, alternating the direction of relative movement with each repetition of step (C).
A method for removing material adhering to a workpiece, comprising the steps of:
- A) creating an interface between a process liquid and a discontinuous phase;
- B) energizing the interface with megasonic energy;
- C) contacting the workpiece with the energized interface and moving the energized interface relative to the workpiece at a controlled rate;
- and D) repeating step (C) a predetermined number of times, alternating the direction of relative movement with each repetition of step (C);
- wherein step (D) is performed without spraying the workpiece.
Dependencies are inferred from the claim text.