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US 2004/0016404 A1Published application
Vaporizer delivery ampoule
AssigneeAdvanced Technology Materials, Inc.
InventorsJohn Gregg, Scott Battle, Jeffrey I. Banton, Donn Naito, Marianne Fuierer
Life of this patent
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Abstract
A vaporizer delivery system for use in semiconductor manufacturing processes including a plurality of vertically stacked containers for holding a vaporizable source material. Each of the vertically stacked containers includes a plurality of vented protuberances extending into the interior of the each stacked container thereby providing channels for passage of a carrier gas between adjacent vertically stacked containers.
Claims32
A vapor delivery system for vaporization and delivery of a source material, comprising:
- a) an ampoule comprising an ampoule bottom, sidewall and removable top to form an internal ampoule compartment;
- b) a gas inlet and gas outlet communicatively connected to the ampoule;
- c) at least one source material container positioned within the internal ampoule compartment, wherein the container comprises a container bottom and side wall to form a container cavity;
- and
- d) a plurality of vented protuberances positioned in at least the container bottom to provide channels therethrough, wherein the vented protuberances extend into the container cavity.
2 more elements
A vaporizer comprising:
- a) an ampoule comprising an ampoule bottom and an ampoule sidewall to form an internal compartment;
- b) an ampoule top to enclose the internal compartment;
- c) a gas inlet and gas outlet communicatively connected to the ampoule top;
- d) a plurality of vertically stacked contacting containers positioned within the internal compartment, wherein each container comprises a container bottom and a container sidewall to form a container cavity for holding of a solid precursor material, and wherein each container sidewall contacts the ampoule sidewall;
- e) a plurality of vented protuberances positioned on each container bottom to provide channels between adjacent vertically stacked contacting containers, wherein the vented protuberances extend into the container cavity;
- f) a carrier gas dip tube positioned within the internal compartment and communicatively connected to the gas inlet for directing a carrier gas to below the vertically stacked contacting containers;
- and
- g) means for heating the ampoule.
5 more elements
A vaporizer unit, comprising:
- a) a plurality of vertically stacked containers wherein each container has a cavity for holding a source material;
- b) a plurality of vented protuberances positioned in each of the vertically stacked containers and extending into each respective cavity, wherein the vented protuberances form channels for passage of a carrier gas between adjacent vertically stacked containers;
- and
- c) a carrier gas tube contacting the plurality of vertically stacked containers and extending through the cavity of each vertically stacked container.
1 more element
A vaporizer unit, comprising:
- a) at least one container for holding a vaporizable source material;
- b) a plurality of vented protuberances positioned in the container, wherein the vented protuberances provide channels for passage of the vaporizable source material;
- and
- c) a carrier gas tube to introduce a stream of the carrier gas for passage through the container.
1 more element
A method for delivering a vaporized source material to a downstream process chamber, the method comprising:
- a) providing a plurality of interconnected, vertically stacked containers having a vaporizable source material contained therein, wherein each of interconnected, vertically stacked containers comprise a plurality of channeled protuberances;
- b) positioning the interconnected, vertically stacked containers within a sealable ampoule;
- c) applying heat to the sealable ampoule in a sufficient amount to vaporize the source material therein;
- and
- d) introducing a carrier gas into the sealable ampoule for moving the vaporized source material through the sealable ampoule to the process chamber.
2 more elements
A vaporizer comprising:
- a) an ampoule comprising an ampoule bottom and an ampoule sidewall to form an internal compartment;
- b) an ampoule top to enclose the internal compartment;
- c) a gas inlet and gas outlet communicatively connected to the ampoule top;
- d) a plurality of vertically stacked contacting containers positioned within the internal compartment, wherein each container comprises a container bottom and a container sidewall to form a container cavity for holding of a solid precursor material, and wherein each container sidewall contacts the ampoule sidewall;
- e) a plurality of vents positioned on each container bottom to provide channels between adjacent vertically stacked contacting containers;
- f) a carrier gas dip tube positioned within the internal compartment and communicatively connected to the gas inlet for directing a carrier gas to below the vertically stacked contacting containers;
- and
- g) means for heating the ampoule.
5 more elements
Dependencies are inferred from the claim text.