Atomic force microscopy measurements of contact resistance and current-dependent stiction
AssigneeFidelica Microsystems, Inc.
InventorShiva Prakash
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Abstract
A modified atomic force microscope (AFM) is used to perform contact resistance and/or current-dependent stiction measurements for conductive thin films at controlled values of applied force. The measurements are preferably performed under conditions approximating the operation of the thin films as electrodes in microswitch array fingerprint sensors. A first, planar thin film is contacted with a second, curved thin film deposited over a round ball having a diameter of a few microns to a few tens of microns. The second film is preferably a coating deposited over the ball and over the arm controlling the ball motion. The coating deposited over the arm provides an electrically conductive path to the contact surface of the ball.
Claims5
A method of testing comprising:
- disposing a first film of a first contact material on a substrate;
- disposing a second film of a second contact material on a rounded end piece,
- wherein a radius of curvature of the rounded piece along a contact surface between the first film and the second film is higher than 10 μm and lower than 100 μm;
- and
- measuring a characteristic related to the first film and the second film contacting using at least one measurement circuit to perform at least one measurement after the first film and the second film contact each other at a controlled force.
The method according to 1 wherein the characteristic is a current-dependent stiction force value and wherein the step of measuring the characteristic related to the first film and the second film contacting occurs after the first film and the second film contact with the controlled force and while the first film and the second film contact with a stiction measurement force not exceeding 1 mN.
Dependencies are inferred from the claim text.