US 2004/0005752 A1 · Formation of standard voltage threshold and low voltage threshold MOSFET devices

Abstract

Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. Wells defining the locations of first type standard Vt devices are masked, and a first voltage threshold implant adjustment is performed within wells defining the second type standard Vt devices, and each of the first and second type low Vt devices. Wells that define the locations of second type standard Vt devices are masked, and a second voltage threshold implant adjustment is performed to the wells defining the first type standard Vt devices, and each of the first and second type low Vt devices. Doped polysilicon gate stacks are then formed over the wells. Performance characteristics and control of each device Vt is controlled by regulating at least one of the first and second voltage threshold implant adjustments, and the polysilicon gate stack doping.

Claims32

Dependent claims

A method of forming a CMOS device comprising:

defining at least one standard voltage threshold first type region in a substrate;
defining at least one standard voltage threshold second type region in said substrate;
defining at least one low voltage threshold first type region in said substrate;
defining at least one low voltage threshold second type region in said substrate;
forming a first type well in said substrate at each location defining said standard voltage threshold second type region;
forming a first type well in said substrate at each location defining said low voltage threshold second type region;
forming a second type well in said substrate at each location defining said standard voltage threshold first type region;
forming a second type well in said substrate at each location defining said low voltage threshold first type region;
doping said substrate with a first voltage threshold implant such that each standard voltage threshold second type region, each low voltage threshold first type region, and each low voltage threshold second type region is exposed to said first voltage threshold implant;
doping said substrate with a second voltage threshold implant such that each standard voltage threshold first type region, each low voltage threshold first type region, and each low voltage threshold second type region is exposed to said second voltage threshold implant;
forming a polysilicon gate over each of said first and second type wells;
doping said polysilicon gates over each of said first type wells with a first gate conductor dopant;
and,
doping said polysilicon gates over each of said second type wells with a second gate conductor dopant.

11 more elements

A method of forming a CMOS device comprising:

defining at least one standard voltage threshold first type region in a substrate;
defining at least one standard voltage threshold second type region in said substrate;
defining at least one low voltage threshold first type region in said substrate;
defining at least one low voltage threshold second type region in said substrate;
forming a first type well in said substrate at each location defining said standard voltage threshold second type region;
forming a first type well in said substrate at each location defining said low voltage threshold second type region;
forming a second type well in said substrate at each location defining said standard voltage threshold first type region;
forming a second type well in said substrate at each location defining said low voltage threshold first type region;
doping said substrate with a first voltage threshold implant such that each standard voltage threshold first type region avoid exposure to said first voltage threshold implant;
doping said substrate with a second voltage threshold implant such that each standard voltage threshold second type region avoid exposure to said second voltage threshold implant;
forming a polysilicon gate over each of said first and second type wells;
doping said polysilicon gates over each of said first type wells with a first gate conductor dopant;
and,
doping said polysilicon gates over each of said second type wells with a second gate conductor dopant.

11 more elements

A method of making a CMOS device having standard and low voltage threshold gates for both PMOS and NMOS transistors comprising:

forming isolation regions in a substrate;
forming a P-type well in said substrate defining a standard voltage threshold NMOS region;
forming an N-type well in said substrate defining a standard voltage threshold PMOS region;
forming a P-type well in said substrate defining a low voltage threshold NMOS region;
forming an N-type well in said substrate defining a low voltage threshold PMOS region;
forming a sacrificial oxide layer over said substrate;
providing a first mask generally over said standard voltage NMOS region;
implanting a P-type impurity into said substrate, wherein said first mask prevents said P-type impurity from implanting into said standard voltage NMOS region;
removing said first mask from said substrate;
providing a second mask generally over said standard voltage PMOS region;
implanting an N-type impurity into said substrate, wherein said second mask prevents said N-type impurity form implanting into said standard voltage PMOS region;
removing said second mask from said substrate;
removing said sacrificial oxide layer from said substrate;
forming a gate oxide layer over said substrate in the regions of said substrate defining said standard voltage NMOS region, said standard voltage PMOS region, said low voltage NMOS region, and said low voltage PMOS region;
forming a polysilicon gate stack over said gate oxide layer in the regions of said substrate defining said standard voltage NMOS region, said standard voltage PMOS region, said low voltage NMOS region, and said low voltage PMOS region;
providing a third mask generally over said standard voltage PMOS region and said low voltage PMOS region;
doping said polysilicon gate stacks over said standard voltage NMOS region and said low voltage NMOS region with an N-type impurity;
removing said third mask from said substrate;
providing a fourth mask generally over said standard voltage NMOS region and said low voltage NMOS region;
doping said polysilicon gate stacks over said standard voltage PMOS region and said low voltage PMOS region with a P-type impurity;
removing said fourth mask from said substrate;
forming lightly doped drain regions about each of said gate stacks;
forming gate spacers about said gate stacks;
and,
performing source/drain region implants about said gate stacks.

22 more elements

A dual gate CMOS device process comprising:

forming a plurality of wells in a substrate,
forming at least four transistors including a standard voltage threshold NMOS transistor, a standard voltage threshold PMOS transistor, a low voltage threshold NMOS transistor, and a low voltage threshold PMOS transistor, each transistor formed over a select one of said wells, wherein the voltage threshold of a select one of said transistors is individually adjustable by:
adjusting at least one of the energy level of an NMOS voltage threshold well implant applied to the well of said select one of said transistors, the level of concentration of said NMOS voltage threshold well implant applied to the well of said select one of said transistors, the energy level of an N-type impurity transistor gate conductor dopant applied to the gate of said select one of said transistors, and the level of concentration of said N-type impurity transistor gate conductor dopant applied to the gate of said select one of said transistors where said select one of said transistors comprises said standard voltage threshold NMOS transistor;
adjusting at least one of the energy level of a PMOS voltage threshold well implant applied to the well of said select one of said transistors, the level of concentration of said PMOS voltage threshold well implant applied to the well of said select one of said transistors, the energy level of an P-type impurity transistor gate conductor dopant applied to the gate of said select one of said transistors, and the level of concentration of said P-type impurity transistor gate conductor dopant applied to the gate of said select one of said transistors where said select one of said transistors comprises said standard voltage threshold PMOS transistor;
adjusting at least one of the energy level of an NMOS voltage threshold well implant applied to the well of said select one of said transistors, the level of concentration of said NMOS voltage threshold well implant applied to the well of said select one of said transistors, the energy level of a PMOS voltage threshold well implant applied to the well of said select one of said transistors, the level of concentration of said PMOS voltage threshold well implant applied to the well of said select one of said transistors, the energy level of an N-type impurity transistor gate conductor dopant applied to the gate of said select one of said transistors, and the level of concentration of said N-type impurity transistor gate conductor dopant applied to the gate of said select one of said transistors where said select one of said transistors comprises said low voltage threshold NMOS transistor;
and,
adjusting at least one of the energy level of an NMOS voltage threshold well implant applied to the well of said select one of said transistors, the level of concentration of said NMOS voltage threshold well implant applied to the well of said select one of said transistors, the energy level of a PMOS voltage threshold well implant applied to the well of said select one of said transistors, the level of concentration of said PMOS voltage threshold well implant applied to the well of said select one of said transistors, the energy level of an P-type impurity transistor gate conductor dopant applied to the gate of said select one of said transistors, and the level of concentration of said P-type impurity transistor gate conductor dopant applied to the gate of said select one of said transistors where said select one of said transistors comprises said low voltage threshold PMOS transistor.

4 more elements

A CMOS device having standard and low voltage threshold gates for both PMOS and NMOS transistors fabricated by the process comprising:

forming isolation regions in a substrate;
forming a P-type well in said substrate defining a standard voltage threshold NMOS region;
forming an N-type well in said substrate defining a standard voltage threshold PMOS region;
forming a P-type well in said substrate defining a low voltage threshold NMOS region;
forming an N-type well in said substrate defining a low voltage threshold PMOS region;
forming a sacrificial oxide layer over said substrate;
providing a first mask generally over said standard voltage NMOS region;
implanting a P-type impurity into said substrate, wherein said first mask prevents said P-type impurity from implanting into said standard voltage NMOS region;
removing said first mask from said substrate;
providing a second mask generally over said standard voltage PMOS region;
implanting an N-type impurity into said substrate, wherein said second mask prevents said N-type impurity form implanting into said standard voltage PMOS region;
removing said second mask from said substrate;
removing said sacrificial oxide layer from said substrate;
forming a gate oxide layer over said substrate in the regions of said substrate defining said standard voltage NMOS region, said standard voltage PMOS region, said low voltage NMOS region, and said low voltage PMOS region;
forming a polysilicon gate stack over said gate oxide layer in the regions of said substrate defining said standard voltage NMOS region, said standard voltage PMOS region, said low voltage NMOS region, and said low voltage PMOS region;
providing a third mask generally over said standard voltage PMOS region and said low voltage PMOS region;
doping said polysilicon gate stacks over said standard voltage NMOS region and said low voltage NMOS region with an N-type impurity;
removing said third mask from said substrate;
providing a fourth mask generally over said standard voltage NMOS region and said low voltage NMOS region;
doping said polysilicon gate stacks over said standard voltage PMOS region and said low voltage PMOS region with a P-type impurity;
removing said fourth mask from said substrate;
forming lightly doped drain regions about each of said gate stacks;
forming gate spacers about said gate stacks;
and,
performing source/drain region implants about said gate stacks.

22 more elements

Dependencies are inferred from the claim text.

Formation of standard voltage threshold and low voltage threshold MOSFET devices

Life of this patent

Formation of standard voltage threshold and low voltage threshold MOSFET devices

Life of this patent

Abstract

Claims32