Thin-film semiconductor device, manufacturing method of the same and image display apparatus
AssigneeHitachi, Ltd.
InventorsSeong-Kee Park, Shinya Yamaguchi, Mutsuko Hatano, Takeo Shiba
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Abstract
A thin-film semiconductor device is such that an island region of an isolated single-crystal thin-film is formed on an entire surface or within a specific region of an insulating film by utilizing cohesion phenomena due to the surface tension of a melted semiconductor, wherein more than one active region of a thin-film transistor is formed in this island region.
Claims15
A thin-film semiconductor device having an insulating substrate, and an island region of an isolated single-crystal thin-film as provided above the insulating substrate.
A manufacturing method of a thin-film semiconductor device, said method comprising:
- a first step of forming a semiconductor thin-film above an insulating substrate and performing patterning of the semiconductor thin-film;
- a second step of patterning a plurality of materials different in surface tension and disposing patterned materials at upper part or lower part of the semiconductor thin-film;
- a third step of melting the semiconductor thin-film by laser scanning and utilizing cohesion phenomena due to its surface tension to perform position control in such a way as to perform positional alignment with a patterned position to thereby form an island region of an isolated single-crystal thin-film above said insulating substrate;
- and
- a fourth step of forming more than one active region of a thin-film transistor in the island region of the isolated single-crystal thin-film.
An image display apparatus including an image display unit, a peripheral region thereof, and a thin-film semiconductor device being provided at least in the peripheral region of the image display unit and having an insulating substrate and an island region of an isolated single-crystal thin-film as provided above the insulating substrate, wherein said thin-film semiconductor device includes:
- at least one circuit for driving said image display apparatus as selected from the group consisting of a buffer circuit, a sampling switch circuit, a precharge circuit, a shift register circuit, a decoder circuit, a clock waveform reshaping circuit, a digital-to-analog converter circuit, a power supply conversion circuit, a level shift circuit, a timing control circuit, an amplifier circuit, a memory, a processor, a gate array and a communication circuit.
Dependencies are inferred from the claim text.