Method and apparatus using nanotubes for cooling and grounding die
AssigneeIntel Corporation
InventorsDamion T. Searls, Terrance J. Dishongh, James Daniel Jackson
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AssigneeIntel Corporation
InventorsDamion T. Searls, Terrance J. Dishongh, James Daniel Jackson
Estimating the term…
An embodiment of the present invention described and shown in the specification and drawings is a process and a package for facilitating cooling and grounding of a semiconductor die using carbon nanotubes in a thermal interface layer between the die and a thermal management aid. The embodiments that are disclosed have the carbon nanotubes positioned and sized to utilize their high thermal and electrical conductance to facilitate the flow of heat and current to the thermal management aid. One embodiment disclosed has the carbon nanotubes mixed with a paste matrix before being applied. Another disclosed embodiment has the carbon nanotubes grown on the surface of the semiconductor die.
An integrated circuit package, comprising
A thermal interface layer for use as a intermediate in manufacturing a circuit package containing a die and a thermal management aid, the layer comprising:
A process for coupling a die to a thermal management aid, comprising:
A process for providing a thermal conduction path from circuit die to a thermal management aid, the process comprising:
The process of 23, wherein forming the array of nanotubes comprises forming a plurality of bundles nanotubes on the surface of the die.
Dependencies are inferred from the claim text.