Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices
AssigneeNanosys, Inc.
InventorsStephen Empedocles, Larry Bock, Calvin Chow, Xianfeng Duan, Chungming Niu, George Pontis, Vijendra Sahi, Linda T. Romano, David Stumbo
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Abstract
Nanostructure manufacturing methods and methods for assembling nanostructures into functional elements such as junctions, arrays and devices are provided. Systems for practicing the methods are also provided.
Claims315
A method of forming nanostructures, the method comprising:
- patterning a nanostructure catalyst on a substrate in a plurality of patterned elements, wherein a volume of the patterned elements has a sphere diameter less than the diameter of a selected nanostructure;
- heating the nanostructure catalysts to form nanostructure catalyst spheres;
- adding nanostructure precursors to form the spheres;
- and,
- forming nanostructures from the nanostructure precursors.
An array of nanostructures comprising an arbitrary pattern of a plurality of nanostructures, each nanostructure comprising a selected diameter.
A patterned array of nanostructure catalyst elements on a substrate, wherein a volume of a plurality of the patterned elements has a sphere diameter less than a nanostructure.
An array of nanostructure catalyst or nanostructure precursor spheres on a substrate, wherein a volume of a plurality of the spheres has a sphere diameter approximately equal to a nanostructure.
A method of growing a nanostructure in a selected direction or orientation, the method comprising applying a magnetic field to a eutectic interface between a nanostructure crystal and a catalyst mixture comprising a magnetic colloid and a nanostructure precursor.
A system comprising a nanostructure crystal, a catalyst mixture comprising a magnetic colloid proximal to or in contact with the crystal, an electrical, magnetic, or electromagnetic field generator and a controller which directs orientation or intensity of a magnetic field produced by the magnetic field generator.
A method of making arrays of nanostructures, the method comprising:
- flowing at least a first set of nanostructures into position to form a first array of nanostructures, wherein the nanostructures of the first array are reversibly immobilized in position;
- disassembling or moving the first array of nanostructures by unimmobilizing the first set of nanostructures or the first array, or both;
- and,
- flowing at least a second set of nanostructures into position to form a second array of nanostructures, wherein the nanostructures of the second array are immobilized.
A system for making arrays of nanostructures, comprising:
- a first source comprising a first suspension of nanostructures;
- a fluid conduit coupling the first suspension of nanostructures to a nanostructure array construction region, which array construction region is configured to reversibly detain nanostructures from the first suspension such that the nanostructures in the suspensions are connected into an operable nanostructure array;
- and,
- a controller which regulates reversible detention of the nanostructures in the nanostructure array construction region.
A method of performing an assay, the method comprising:
- flowing at least a first set of nanostructures into position to form a first array of nanostructures;
- performing an assay, which assay produces an assay result that is detectable by the first array;
- and,
- detecting the assay result.
A method of harvesting a nanostructure, comprising etching away an etchable portion of the nanostructure or an etchable material in contact with the nanostructure to release the nanostructure nanotube or nanodot from the etchable portion or etchable material.
A system comprising an etchant, and
- one or more nanostructure comprising an etchable portion;
- or,
- one or more nanostructure coupled to an etchable material.
A method of making one or more controlled length nanostructure, the method comprising:
- depositing at least one nanostructure catalyst on a substrate;
- growing a nanostructure from the catalyst in a nanostructure growth process that comprises adding a first and a second material at different times during growth of the nanostructure, thereby controllably incorporating the first or second material, or both, into the nanostructure during the growth process;
- and,
- exposing the resulting nanostructure to an etchant that differentially etches regions of the nanostructure made from the first or second material, thereby controllably cleaving the nanostructure into one or more controlled length nanostructures.
A system for making controlled length nanostructures, the system comprising:
- a substrate;
- a source of a nanostructure catalyst;
- system instructions for transporting the catalyst to the substrate and for depositing the nanostructure catalyst on the substrate;
- a source of a first nanostructure precursor material,
- a source of a second nanostructure precursor material;
- system instructions for transporting the nanostructure precursors from the nanostructure precursor sources to the substrate and into contact with deposited nanostructure catalyst, under conditions suitable for nanostructure growth;
- system instructions for periodically introducing the first or second material from the first or second precursor material source to the substrate during growth of the nanostructure, thereby providing for controlled introduction of the first or second material during growth of the nanostructure;
- a source of etchant that differentially etches regions of the nanostructure made from the first or second precursor material;
- and,
- instructions for introducing the etchant into contact with the nanostructure, thereby controllably cleaving the nanostructure into controlled length nanostructures.
A population of nanostructures comprising substantially similar lengths and dopant material composition, wherein the dopant material is heterogeneously distributed through the nanostructures.
An array of nanostructures, comprising a substrate having a plurality of nanostructures projecting therefrom, wherein the nanostructures have at least one material similarly distributed in a plurality of regions of the nanostructures, wherein the distribution of the at least one material is non-uniform.
A method of making a nanostructure device, the method comprising:
- providing a substrate;
- depositing a nanostructure catalyst particle on the substrate;
- growing a nanostructure from the catalyst particle, thereby providing a nanostructure with a catalyst particle at one end of the nanostructure;
- and,
- connecting the end comprising the catalyst particle to one or more electrical contacts.
A nanostructure device, comprising a substrate having a nanostructure thereon, wherein the nanostructure is coupled to a particle at least at one end of the nanostructure, wherein the particle is coupled to an electrical contact.
A method of controlling growth of a nanostructure, the method comprising:
- providing an electric field between two electrodes, at least one of said electrodes comprising a nanostructure catalyst;
- growing a nanostructure between the electrodes, wherein the electric field affects the direction of nanostructure growth;
- automatically detecting nanostructure contact between the electrodes, or a change in capacitance between the electrodes;
- and,
- modifying the electric field in response to the nanostructure contact or the change in capacitance.
A system for controlling nanostructure growth, the system comprising:
- a first electrode and a second electrode, wherein at least one of the electrodes comprises a nanostructure catalyst;
- a nanostructure precursor;
- a power source coupled to the electrodes;
- a detector which detects nanostructure contact between the two electrodes;
- and,
- a controller which controls the power source in response to a signal from the detector.
A method of making geometrically defined nanostructures, the method comprising:
- providing a nanostructure template;
- seeding the template with a nanostructure catalyst;
- and,
- growing nanostructures from or on the template, wherein the shape, direction, orientation, position or any combination thereof of the nanostructures is constrained by the template.
The method of clam 233, wherein the shape or the position of the wells constrains the shape or position of nanostructures grown from the template.
A system for making geometrically defined nanostructures, the system comprising:
- a template seeded with a nanostructure catalyst;
- and,
- a nanostructure precursor.
The system of clam 244, wherein the shape or the position of the wells are structured to constrain the shape or position of nanostructures grown from the template.
A method of depositing nanostructures on a substrate, the method comprising:
- suspending nanostructures in solution;
- applying the resulting nanostructure solution to a rotatable substrate;
- and,
- rotating the rotatable substrate, thereby depositing the nanostructures on the rotating rotatable substrate.
A system for radially aligning nanostructures, the system comprising:
- a rotatable substrate adapted to receive nanostructures;
- a rotation mechanism which is configured to rotate the rotatable substrate;
- a suspension of nanostructures;
- and,
- a contact module which contacts the suspension of nanostructures to the rotatable substrate.
A method of depositing a nanostructure into a defined location on a substrate comprising:
- binding a catalyst material located substantially at an end of the nanostructure to a defined location on the substrate;
- and,
- using fluid flow to orient an opposite end of the nanostructure in a direction parallel to a direction of flow and oriented away from a location of the bound catalyst.
A large scale method of nanostructure production, the method comprising:
- providing a particulate nanostructure catalyst to a fluid or aerosol reactor;
- and,
- growing nanostructures from the particulate catalysts.
A system for nanostructure production, comprising:
- a particulate nanostructure catalyst, a fluid or aerosol reaction chamber and a nanostructure precursor.
A method of making nanostructures, the method comprising:
- entrapping a nanostructure catalyst in a flowing gas or plasma stream;
- contacting the nanostructure catalyst with one or more nanostructure precursors, whereby the nanostructures are formed in the flowing gas or plasma stream;
- and,
- extracting the nanostructures from the flowing gas or plasma stream.
A continuous phase nanostructure synthesis system, comprising:
- a gas or plasma source;
- a nanostructure synthesis region;
- a flow path that permits flow of gas or plasma from the gas or plasma source to the nanostructure synthesis region;
- a nanostructure catalyst source coupled to the synthesis region;
- a nanostructure precursor source coupled to the synthesis region;
- a nanostructure extraction site coupled to the synthesis region;
- and,
- a gas or plasma extraction region downstream of the synthesis region, wherein the nanostructure synthesis system is configured to flow gas from the gas source to the gas extraction region during synthesis of the nanostructure in the synthesis region.
A method of making a functionalized nanostructure or nanostructure precursor, comprising:
- treating the nanostructure or precursor with a functionalizing plasma, whereby a functional group is attached to the precursor or nanostructure.
A plasma comprising a functionalizing precursor and a nanostructure precursor or a nanostructure.
A nanostructure comprising a nitride layer.
Dependencies are inferred from the claim text.