Photo sensor and method of forming the same
OwnerLiang-Hua Lin, Anchor Cheninventors
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Abstract
A method of forming a photo sensor in a photo diode is provided. The photo diode is formed in a semiconductor wafer. The semiconductor wafer includes a substrate with a first conductive type, and an insulating layer surrounding the photo sensor. A first ion implantation process, utilizing dopants with a second conductive type, is performed to form a plurality of first doped regions in the surface of the photo sensor. A second ion implantation process, utilizing dopants with the second conductive type, is performed to form a second doped region in the surface of the photo sensor. The second doped region is overlapped with a portion of each of the first doped regions.
Claims19
A method of forming a photo sensor in a photo diode formed on a semiconductor wafer, a surface of the semiconductor comprising a substrate with first-type dopants, and an insulating layer positioned on a surface of the substrate and surrounding the photo sensor, the method comprising:
- performing a first ion implantation process utilizing second-type dopants to form a plurality of first doped regions on a surface of the photo sensor;
- and
- performing a second ion implantation process utilizing second-type dopants to form a second doped region on the surface of the photo sensor, and the second doped region being overlapped with a partial region of each of the first doped regions.
A method of forming a photo sensor in a photo diode formed on a predetermined region of a P-type substrate of a semiconductor wafer, the predetermined region being surrounded by an insulating layer, the method comprising:
- performing a first ion implantation process to form a plurality of first N-type doped regions on a surface of the predetermined region;
- and
- performing a second ion implantation process to form a second N-type doped region on the surface of the predetermined region, and to form at least a lightly doped drain (LDD) on a surface of the semiconductor wafer outside the predetermined region.
Dependencies are inferred from the claim text.