Treatment of effluent from a substrate processing chamber

An effluent treatment reactor to treat an effluent exhausted from a process chamber, the effluent treatment reactor comprising:

• (a) an effluent inlet to receive the effluent from the process chamber;
• (b) coaxial inner and outer tubes, the outer tube having capped ends and extending beyond the inner tube such that received effluent can flow from one tube to another, at least one tube comprising a dielectric having an embedded first electrode that may be electrically coupled to a second electrode about the tube, and at least one of tube comprising a scrubbing fluid inlet to introduce a scrubbing fluid into the tube;
• (c) a voltage source to electrically bias the first and second electrodes to transfer power to the effluent to form a plasma therein to treat the effluent;
• and
• (d) an effluent outlet to release the treated effluent.

An effluent treatment reactor to treat an effluent from a process chamber, the effluent treatment reactor comprising:

• (a) a pre-scrubbing cell comprising:
• an effluent inlet to receive the effluent from the process chamber;
• and
• a pre-scrubbing fluid inlet to dispense a scrubbing fluid in the received effluent;
• (b) a plasma cell to receive effluent from the pre-scrubbing cell, the plasma cell comprising:
• a first cylinder having a first electrode embedded therein;
• a second electrode extending into the inner cylinder;
• and
• a voltage source to electrically power the first and second electrodes to form a plasma of the received effluent;
• (c) a post-scrubbing cell in the volume between the first cylinder and a second cylinder coaxially external to the first cylinder, the post-scrubbing cell comprising:
• post-scrubbing inlets to introduce scrubbing fluid into the post-scrubbing cell to treat the effluent passing therethrough;
• and
• a scrubbing fluid outlet;
• and
• (d) an effluent outlet to release the treated effluent.

An effluent treatment reactor to treat an effluent from a process chamber, the effluent treatment reactor comprising:

• a scrubbing cell comprising:
• (1) an effluent inlet to receive the effluent from the process chamber;
• (2) spaced apart effluent injector nozzles capable of injecting effluent into the scrubbing cell at directions that are tangential to a circle within the scrubbing chamber;
• (3) a scrubbing fluid inlet to spray a scrubbing fluid across the path of the tangentially injected effluent to treat the effluent;
• (4) a scrubbing fluid outlet;
• and
• (5) an effluent outlet to release the scrubbed effluent.

An effluent treatment reactor to treat an effluent from a process chamber, the effluent treatment reactor comprising:

• a pre-scrubbing cell to receive the effluent from the process chamber, the pre-scrubbing cell comprising effluent injector nozzles that are spaced apart from one another and capable of injecting effluent into the scrubbing cell at directions that are tangential to a circle within the pre-scrubbing cell, a scrubbing fluid inlet to spray a scrubbing fluid across the path of the tangentially injected effluent to treat the effluent, and additive gas inlets adapted to introduce an additive gas into the effluent;
• a plasma cell to form a plasma of the pre-scrubbed effluent and additive gases;
• and
• a post-scrubbing cell to scrub the effluent and additive gases.