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AssigneeHitachi, Ltd.
InventorsHideaki Tanaka, Kenji Furusawa, Takateru Seki, Akio Takakura, Yukihiro Isono
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In order to realize a shape of an air bearing surface of a magnetic head slider which is capable of coping with a lowering of flying height and which has high reliability, at the time of polishing the air bearing surface of the magnetic head slider by bringing the air bearing surface and the surface of a polishing machine into contact with each other, machining is conducted in the condition where the stiffness acting between both the members is enhanced, and the standard deviation of the flatness of the air bearing surface machined and the standard deviation of the recess amount between the air bearing surface and a magnetic element are controlled. Thus, it is possible to efficiently manufacture a magnetic head slider which enables driving at a low flying height.
A magnetic head slider including in a group of magnetic head sliders, each having a shape of an air bearing surface formed on a slider substrate, such that the standard deviation of said group for a recess amount X1 between said air bearing surface and the surface of a magnetic head element that is disposed on said slider substrate with an insulating film and a shield portion interposed therebetween is not more than 0.8 nm, and the standard deviation of said group for the dispersion X2 of surface flatness of said air bearing surface is not more than 0.6 nm.
A method of manufacturing a magnetic head slider comprising a magnetic head element that is disposed on a slider substrate having an air bearing surface with an insulating film and a shield portion interposed therebetween, wherein said air bearing surface of said slider held on a workpiece-holding unit is polished by a polished surface of a polishing surface plate being rotated while maintaining a relative angular relationship between said air bearing surface and said polishing surface.
Dependencies are inferred from the claim text.