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AssigneeSilicon Light Machines Corporation
InventorsChristopher Gudeman, James Hunter, Richard Yeh, David T. Amm
Estimating the term…
A MEM device in accordance with the invention comprises one or more movable micro-structures which are preferably ribbon structures or cantilever structures. The ribbon structures or cantilever structures are preferably coupled to a substrate structure through one or more support regions comprising a plurality of anchor support features and a plurality of post support features. The MEM device is preferably an optical MEM device with a plurality of movable ribbon structures each being supported by opposing ends through support regions each comprising a plurality of anchor support features and a plurality of post support features. In accordance with the method of the embodiments, the positions of the anchor and post support features, the number of anchor and support features and the spacings between the support features can selected during fabrication of the device to determine an operating condition of the MEM device.
A micro-device comprising an elongated micro-structure coupled to a substrate by at least one end through a securing region comprising sets of securing features arranged laterally along the at least one end.
A micro-structure comprising an elongated ribbon coupled to a substrate through at least two securing regions, each securing region comprising a plurality of larger anchor features arranged in a row along a width of the elongated ribbon and a plurality of smaller anchor features arranged in a parallel row along the width of the ribbon.
A method of making a micro-device comprising:
A device comprising a plurality of ribbons suspended over a substrate, wherein each of the ribbons are suspended over the substrate by opposing ends through a plurality of anchor features and a plurality of post features.
A method of fabricating an optical MEM device comprising:
Dependencies are inferred from the claim text.