Sample inclination measuring method
AssigneeFuji Photo Optical Co., Ltd.
InventorsZongtao Ge, Fumio Kobayashi, Kunihiko Tanaka
Life of this patent
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Abstract
A sample inclination measuring method rotates, by a predetermined angle with respect to an interferometer apparatus, a columnar member having a leading end face in a planar form while the columnar member is held by a clamping apparatus, detects a relative angle between a reference surface of the interferometer apparatus and the leading end face at each of two rotational positions, and measures the inclination of the axis of the columnar member by using a predetermined arithmetic expression according to thus detected two angles.
Claims14
A sample inclination measuring method for measuring an inclination of an axis of a columnar member having a leading end face in a planar form while said columnar member is held by a clamping apparatus and said leading end face as a sample is observed by an angle measuring apparatus;
- said method comprising the steps of:
- rotating said columnar member by a predetermined angle with respect to said angle measuring apparatus while in a state held by said clamping apparatus, and detecting angles at each of two rotational positions;
- and
- measuring said inclination of said axis of said columnar member by using a predetermined arithmetic expression according to said detected two angles.
A sample inclination measuring method for measuring an inclination of an axis of a columnar member having a leading end face in a planar form while said columnar member is held by a clamping apparatus and said leading end face as a sample is observed by an interferometer apparatus;
- said method comprising the steps of:
- rotating said columnar member by a predetermined angle with respect to said interferometer apparatus while in a state held by said clamping apparatus, and detecting a relative angle between a reference surface of said interferometer apparatus and said leading end face at each of two rotational positions;
- and
- measuring said inclination of said axis of said columnar member by using a predetermined arithmetic expression according to said detected two angles.
A sample inclination measuring method for measuring an inclination of an axis of a columnar member having a leading end face in a planar form while said columnar member is held by a clamping apparatus and said leading end face as a sample is observed by an interferometer apparatus, and an angle of said leading end face with respect to a perpendicular to said axis of said columnar member;
- said method comprising the steps of:
- rotating said columnar member by a predetermined angle with respect to said interferometer apparatus while in a state held by said clamping apparatus, and detecting a relative angle between a reference surface of said interferometer apparatus and said leading end face at each of two rotational positions;
- and
- measuring said inclination of said axis of said columnar member and an inclination of said leading end face with respect to said perpendicular of said axis of said columnar member by using a predetermined arithmetic expression according to said detected two angles.
Dependencies are inferred from the claim text.