Real time detection of cracked quartz window
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTe-Chin Chiu, Richard Chen, Tsai-Yi Chen
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTe-Chin Chiu, Richard Chen, Tsai-Yi Chen
Estimating the term…
A method of detecting a crack in a body of a quartz window provides for having a source of a laser beam and a light receiver; applying a reflective coating onto an exterior surface of the quartz window; directing the laser beam from the source into the quartz window so that, in the course of successive reflections of the beam from an exterior surface of the quartz window, the beam undergoes a plurality of predetermined strokes within the body of the quartz window thus probing the body, making the conclusion of the absence of a crack in the body of the quartz window by receiving a reflected beam by the light receiver, which is installed so as to catch the beam having unobtrusively passed through the body of the quartz window, or arriving at the conclusion of the presence of a crack in the body of the quartz window if a reflected beam is not received by the light receiver.
A method of detecting a crack in a body of a quartz window comprising the steps of:
A method of detecting a crack in a body of a quartz window comprising the steps of:
A method of detecting a crack in a body of a quartz window comprising the steps of:
Dependencies are inferred from the claim text.