Shielded probe apparatus for probing semiconductor wafer
AssigneeCeladon Systems, Inc.
InventorsBryan J. Root, William A. Funk
Life of this patent
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Abstract
A shielded probe apparatus is provided with a shielded probe and a tri-axial cable that are electrically connected within a shielded chassis. The shielded probe apparatus is capable of electrically testing a semiconductor device at a sub 100 fA operating current and an operating temperature up to 300C.
Claims20
A shielded probe apparatus for testing a semiconductor device, comprising:
- a shielded probe for probing the semiconductor device;
- a tri-axial cable coupled to a test equipment;
- a shielded chassis;
- and
- the tri-axial cable and the shielded probe being configured and arranged to connect to each other within the shielded chassis.
A shielded probe apparatus, capable of electrically testing a semiconductor device at a sub 100 fA operating current and an operating temperature up to 300C, comprising a shielded probe and a tri-axial cable that are electrically connected within a shielded chassis.
Dependencies are inferred from the claim text.