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US 2004/0000847 A1Published application
Microfabricated ultrasonic transducers with curvature and method for making the same
AssigneeSiemens Medical Solutions USA, Inc.
InventorsIgal Ladabaum, Samuel H. Maslak
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Abstract
The present invention provides a microfabricated ultrasonic transducers with curvature. The curvature is made possible by thinning the substrate such that it is flexible enough to be mounted on an assembly with the desired curvature. In one aspect of the invention, the substrate can contain electronic circuits. In another aspect, the assembly mounting can incorporate curved damping materials that serve to remove undesirable substrate modes.
Claims40
A transducer assembly, comprising:
- a microfabricated ultrasonic transducer (MUT) device including a thin substrate, wherein the thin substrate allows the MUT device to achieve a required curvature for a predefined application;
- and
- a backing, wherein the backing is disposed against the thin substrate to result in the MUT device maintaining the required curvature.
A method for making a transducer assembly, comprising the steps of:
- creating a microfabricated ultrasonic transducer (MUT) device, the MUT device being disposed on a substrate;
- thinning the substrate to allow the MUT device to achieve a required curvature for a predefined application;
- and
- disposing a backing against the thinned substrate to result in the MUT device maintaining the required curvature.
1 more element
Dependencies are inferred from the claim text.