Reducing the actuation voltage of microelectromechanical system switches
AssigneeIntel Corporation
InventorsQing Ma, Tsung-Kuan Allen Chou, Valluri Rao
Life of this patent
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Abstract
A microelectromechanical system switch may include a relatively stiff cantilevered beam coupled, on its free end, to a more compliant or flexible extension. A contact may be positioned at the free end of the cantilevered beam. The extension reduces the actuation voltage that is needed and compensates for the relative stiffness of the cantilevered beam in closing the switch. In opening the switch, the stiffness of the cantilevered beam may advantageously enable quicker operation which may be desirable in higher frequency situations.
Claims28
A method comprising:
- forming a microelectromechanical system with a cantilevered beam;
- and
- forming an extension on said cantilevered beam that is more flexible than said beam.
A microelectromechanical system comprising:
- a substrate;
- a cantilevered beam formed over said substrate;
- and
- an extension formed on said cantilevered beam, said extension being more flexible than said beam.
A microelectromechanical system switch comprising:
- a substrate;
- a first movable element mounted on said substrate;
- a second movable element coupled to said first movable element, said second movable element being more flexible than said first movable element;
- a first electrical contact on one of said first and second movable elements;
- a second electrical contact on said substrate;
- and
- said first movable element and said second movable element movable towards and away from said substrate to make or break an electrical connection between said second electrical contact on said substrate and said first electrical contact on one of said first and second movable elements.
Dependencies are inferred from the claim text.