Seal arrangement for a vacuum valve

Abstract

A seal arrangement for a vacuum valve with a valve body (1) in which is arranged a valve opening (2) having a longitudinal axis (5) and which has an inner jacket surface (6) surrounding the valve opening and forming a valve seat, and with a valve plate (3) which closes the valve opening in the closed state of the vacuum valve and which has an outer jacket surface (9) surrounding the valve plate, said inner jacket surface and said outer jacket surface being located opposite one another in the closed state of the valve, wherein the seal arrangement comprises: a sealing ring (14) which is arranged in an annular groove (10) arranged at the outer or inner jacket surface and which has groove flanks (11, 12) and a groove base (13), a sealing surface which is provided at the inner or outer jacket surface and which has a conical shape relative to the longitudinal axis (5) of the valve opening (2) and which is contacted by the sealing ring (14) in the closed state of the vacuum valve, wherein the distance of the groove base (13) from the longitudinal axis (5) of the valve opening changes along the width of the groove (10) at least in the position occupied by the valve plate (3) in the closed state of the vacuum valve and, further, a supporting ring (16) is arranged in the groove laterally next to the sealing ring (14) to limit the deformation of the sealing ring (14) in the closed state of the vacuum valve, and when the groove (10) is formed in the outer jacket surface (9) of the valve plate (3) this supporting ring (16) is located on the side of the sealing ring (14) on which the groove base (13) has a greater distance from the longitudinal axis (5), and when the groove (10) is formed in the inner jacket surface (6) of the valve body (1) this supporting ring (16) is located on the side of the sealing ring (14) on which the groove base (13) has a smaller distance from the longitudinal axis (5), and wherein a side surface (17) of the supporting ring (16) facing the sealing ring (14), together with the portion of the groove base (13) located next to the supporting ring and the adjoining groove flank (11), define a receiving space for the sealing ring (14) contacting this side surface (17) of the supporting ring (16) and increase the width of this receiving space toward the groove base (13).

Dependencies are inferred from the claim text.