Scintillator panel, radiation image sensor and methods of producing them

A scintillator panel comprising:

• a radiation transmitting substrate with heat resistance;
• a dielectric multilayer film mirror, formed on said radiation transmitting substrate;
• a scintillator, deposited so as to arrange a plurality of columnar structures on said dielectric multilayer film mirror and converting radiation, which has entered said radiation transmitting substrate and has passed through said dielectric multilayer film mirror, into light and emitting this light;
• and
• a protective film, covering at least said scintillator;
• wherein
• said dielectric multilayer film mirror reflects light emitted from said scintillator and returns this light toward said scintillator.

A method for making a scintillator panel comprising the steps of:

• preparing a heat-resistant substrate;
• repeatedly depositing a dielectric film of desired thickness onto said substrate to form a dielectric multilayer film mirror with predetermined reflection characteristics;
• depositing columnar structures of scintillator on said dielectric multilayer film mirror;
• and
• coating the scintillator with a protective film.