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US 2004/0000640 A1Published application
Scanning electron microscope and method of controlling same
AssigneeJEOL Ltd.
InventorHiroyoshi Kazumori
Life of this patent
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AssigneeJEOL Ltd.
InventorHiroyoshi Kazumori
Estimating the term…
A scanning electron microscope has an electron gun producing the electron beam, an objective lens for sharply focusing the beam onto the specimen, a tilting mechanism for tilting the specimen relative to the beam, and a power supply for applying the negative voltage to the specimen. This microscope further includes a cylindrical shield electrode mounted to surround the electron beam path between the objective lens and specimen. A front-end electrode is insulatively mounted to the front-end portion of the shield electrode that is on the specimen side. An electric potential substantially identical to the electric potential at the polepieces of the objective lens is applied to the shield electrode. An electric potential substantially identical to the potential at the specimen is applied to the front-end electrode.
In a scanning electron microscope comprising:
A method for controlling a scanning electron microscope having an electron gun for producing an electron beam, an objective lens for sharply focusing the beam onto a specimen, specimen tilting means for tilting the specimen relative to the electron beam, a power supply for applying a negative potential to the specimen, a cylindrical shield electrode for surrounding an electron beam path between the objective lens and the specimen, the shield electrode having a front-end portion on its specimen side, and a front-end electrode insulatively mounted to said front-end portion of the shield electrode, said method comprising the steps of:
Dependencies are inferred from the claim text.