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US 2004/0000379 A1Published application
Evaporation container and evaporation source
AssigneeUlvac, Inc.
InventorsSteven Van Slyke, Toshio Negishi
Life of this patent
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AssigneeUlvac, Inc.
InventorsSteven Van Slyke, Toshio Negishi
Estimating the term…
An evaporation source of the present invention has; a storage receptacle for accommodating an evaporation material, a cover member arranged thereabove and provided with a through hole, and a protective plate arranged beneath the through hole, and positioned with a rim portion outside of the periphery of the through hole. The cover member and the protective plate can be heated together. Even if the evaporation material melts and flies out in droplet form or solid particle form, the droplets or solid particles which fly out adhere to at least one of the cover member and the protective plate, and are then heated and vaporized. Therefore, the evaporation material does not fly out to outside the evaporation source in droplet form or solid particle form. Consequently, there is no deterioration in film quality, and the interior of the apparatus is not contaminated with the droplets or solid particles.
An evaporation container comprising:
An evaporation source comprising:
A vacuum evaporation method comprising:
Dependencies are inferred from the claim text.