Plasma etch chamber equipped with multi-layer insert ring
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsiang-Hsing Liu, Chung-Feng Huang, Yang-Kai Fan, Kwang-Niang Tan, Wen-Chin Tseng
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Abstract
A multi-layer insert ring for engaging a shadow ring in a plasma etch chamber which includes at least two layers stacked together in an opening of the shadow ring. The multi-layer insert ring may be constructed by two layers or three layers by utilizing ground, reprocessed insert rings resulting in significant cost savings. Each of the layers of the multi-layer insert rings has a planar top surface and a planar bottom surface that is parallel to the planar top surface. Only the top layer need to be replaced after repeated usage of the insert ring in plasma etching processes.
Claims20
A shadow ring assembly for use in a plasma etch chamber comprising:
- a shadow ring having an inner diameter and an outer diameter, said inner diameter defines an inner peripheral surface for engaging in a spaced-apart relationship an outer peripheral surface of a wafer pedestal and for preventing plasma ions from entering into a lower compartment of said plasma etch chamber that houses said wafer pedestal, said inner peripheral surface of the shadow ring having a ledge formed therein and an upwardly projecting opening adapted for receiving an insert ring;
- and
- an insert ring formed in at least two layers for supporting by said ledge in said inner peripheral surface of said shadow ring and for filling said upwardly projecting opening, a top surface of an uppermost layer of said at least two layers of said insert ring being substantially planar with a top surface of said shadow ring when said insert ring is installed in said shadow ring.
A plasma etch chamber comprising:
- a chamber enclosure for defining a cavity therein, said chamber enclosure being able to maintain a pressure of not higher than 1 Torr therein;
- a plasma generating source for producing plasma ions for said cavity;
- a wafer pedestal for holding a wafer to be processed thereon;
- a shadow ring having an inner diameter and an outer diameter, said inner diameter defines an inner peripheral surface for engaging in a spaced-apart relationship an outer peripheral surface of said wafer pedestal and for preventing plasma ions from leaking into a lower compartment of said plasma etch chamber that houses said wafer pedestal, said inner peripheral surface of the shadow ring having a ledge formed therein and an upwardly projecting opening from the ledge adapted for receiving an insert ring;
- and
- an insert ring formed in at least two layers for supporting by said ledge in said inner peripheral surface of said shadow ring and for filling said upwardly projecting opening, a top surface of an uppermost layer of said at least two layers of said insert ring being substantially planar with a top surface of said shadow ring when said insert ring is installed in said shadow ring.
An insert ring for engaging a shadow ring in a plasma etch chamber comprising:
- at least two layers stacked together for engaging an opening in said shadow ring;
- said at least two layers further comprises:
- an upper ring having a planar top surface and a planar bottom surface, and
- a lower ring having a planar top surface for intimately engaging said planar bottom surface of said upper ring and a planar bottom surface;
- said upper ring and said lower ring each having a thickness that is not more than one-half of the thickness of said insert ring.
Dependencies are inferred from the claim text.